Multifunctional MoOx and MoOxNy films with 2.5 < x < 3.0 and y < 0.2 prepared using controlled reactive deep oscillation magnetron sputtering

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F21%3A10439454" target="_blank" >RIV/00216208:11320/21:10439454 - isvavai.cz</a>
Alternative codes found
RIV/49777513:23520/21:43960045
Result on the web
<a href="https://verso.is.cuni.cz/pub/verso.fpl?fname=obd_publikace_handle&handle=hin54lxyTI" target="_blank" >https://verso.is.cuni.cz/pub/verso.fpl?fname=obd_publikace_handle&handle=hin54lxyTI</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.tsf.2020.138442" target="_blank" >10.1016/j.tsf.2020.138442</a>

Result language
angličtina
Original language name
Multifunctional MoOx and MoOxNy films with 2.5 < x < 3.0 and y < 0.2 prepared using controlled reactive deep oscillation magnetron sputtering
Original language description
Reactive deep oscillation magnetron sputtering with a pulsed reactive gas flow control and to-substrate reactive gas injection into the high-density plasma in front of the sputtered Mo target was used for a low-temperature (< 120 degrees C) preparation of MoOx and MoOxNy films with 2.5 < x < 3.0 and y < 0.2. We explain the advantages of this deposition technique, allowing us to control smoothly and reproducibly the film composition and thus the film structure and properties. Special attention is paid to the strong effect of slightly decreasing x in MoOx films and slightly increasing y in MoOxNy films on their optical and electrical properties which are directly related to varying electronic structure of the films. We discuss possible applications of these films in the field of solar cells, organic electronic devices and lithium-ion batteries.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
—
OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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