Tunable composition and properties of Al–O–N films prepared by reactive deep oscillation magnetron sputtering
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F20%3A43958584" target="_blank" >RIV/49777513:23520/20:43958584 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.1016/j.surfcoat.2020.125716" target="_blank" >https://doi.org/10.1016/j.surfcoat.2020.125716</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2020.125716" target="_blank" >10.1016/j.surfcoat.2020.125716</a>
Alternative languages
Result language
angličtina
Original language name
Tunable composition and properties of Al–O–N films prepared by reactive deep oscillation magnetron sputtering
Original language description
We report a low-temperature deposition of Al–O–N films in a wide range of compositions. We use and explain the advantages of reactive deep oscillation magnetron sputtering (leading to suppressed arcing on the Al target) with a pulsed reactive gas flow control and optimized reactive gas inlet position (leading to a very smooth composition control, despite the different reactivities of O2 and N2). Next, we focus on the relationships between film composition, structure and functional properties. We demonstrate a smoothly controlled refractive index at a very low extinction coefficient, and identify the Al–O–N composition leading to the highest hardness, elastic recovery and elastic strain to failure. We discuss some of the technological applications which these properties are useful for.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20506 - Coating and films
Result continuities
Project
<a href="/en/project/EF17_048%2F0007267" target="_blank" >EF17_048/0007267: Research and Development of Intelligent Components of Advanced Technologies for the Pilsen Metropolitan Area (InteCom)</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface and Coatings Technology
ISSN
0257-8972
e-ISSN
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Volume of the periodical
392
Issue of the periodical within the volume
25 JUN 2020
Country of publishing house
CH - SWITZERLAND
Number of pages
7
Pages from-to
„125716-1“-„125716-7“
UT code for WoS article
000528843600002
EID of the result in the Scopus database
2-s2.0-85083090607