Structure and properties of Hf-O-N films prepared by high-rate reactive HiPIMS with smoothly controlled composition

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F17%3A43931447" target="_blank" >RIV/49777513:23520/17:43931447 - isvavai.cz</a>
Alternative codes found
RIV/00216208:11320/17:10371320
Result on the web
<a href="http://dx.doi.org/10.1016/j.ceramint.2017.01.102" target="_blank" >http://dx.doi.org/10.1016/j.ceramint.2017.01.102</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.ceramint.2017.01.102" target="_blank" >10.1016/j.ceramint.2017.01.102</a>

Result language
angličtina
Original language name
Structure and properties of Hf-O-N films prepared by high-rate reactive HiPIMS with smoothly controlled composition
Original language description
Hafnium oxynitride ceramics were prepared in the form of thin films by high-power impulse magnetron sputtering of Hf in various Ar+O2+N2 gas mixtures. Smooth composition control was achieved by maximizing the degree of dissociation in plasma, suppressing the importance of the difference between reactivities of undissociated O2 and N2. The application potential of the films was further enhanced by extremely high deposition rates (e.g. 230 nm/min for stoichiometric HfO2; achieved by feedback pulsed reactive gas flow control), low deposition temperatures (< 140 °C) and not using any substrate bias. We focus on the relationships between elemental composition, phase structure, and optical, electrical, mechanical and hydrophobic properties of the materials. We quantify the evolution of smoothly controlled film properties along the transition from an oxide to a nitride, such as increasing extinction coefficient, decreasing electrical resistivity, increasing hardness or increasing water droplet contact angle.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
—
OECD FORD branch
20506 - Coating and films

Project
<a href="/en/project/GA14-03875S" target="_blank" >GA14-03875S: Nanostructured multifunctional coatings prepared using highly ionized pulsed plasmas</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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