Imaging of nanostructures with sub-100 nm spatial resolution using a desktop EUV microscope
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21460%2F12%3A00196864" target="_blank" >RIV/68407700:21460/12:00196864 - isvavai.cz</a>
Result on the web
<a href="http://link.springer.com/content/pdf/10.1007%2Fs00340-012-5125-3" target="_blank" >http://link.springer.com/content/pdf/10.1007%2Fs00340-012-5125-3</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1007/s00340-012-5125-3" target="_blank" >10.1007/s00340-012-5125-3</a>
Alternative languages
Result language
angličtina
Original language name
Imaging of nanostructures with sub-100 nm spatial resolution using a desktop EUV microscope
Original language description
Laser-produced plasma sources of short-wavelength radiation offer an interesting alternative to synchrotron and free-electron laser installations. Recently, we reported on a newly developed desktop EUV microscope based on plasma generated from a gas-pufftarget and diffractive optics. The half-pitch resolution of the microscope approached 50 nm. Compared to analogous microscopes based on synchrotron sources, our system is compact and cost-effective. In this paper, we present the results of imaging experiments on a thin polycrystalline object that was carried out in order to further examine the applicability of the microscope. We have demonstrated here that EUV microscopy can provide structural information that cannot be accessed by conventional opticalmicroscopy or SEM.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Result continuities
Project
<a href="/en/project/KAN300100702" target="_blank" >KAN300100702: Creating and probing nanostructures with X-ray lasers</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Applied Physics B: Lasers and Optics
ISSN
0946-2171
e-ISSN
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Volume of the periodical
109
Issue of the periodical within the volume
1
Country of publishing house
DE - GERMANY
Number of pages
7
Pages from-to
105-111
UT code for WoS article
000310743700016
EID of the result in the Scopus database
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