A stand-alone compact EUV microscope based on gas-puff target source
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21340%2F17%3A00303226" target="_blank" >RIV/68407700:21340/17:00303226 - isvavai.cz</a>
Alternative codes found
RIV/68407700:21460/17:00303226
Result on the web
<a href="http://onlinelibrary.wiley.com/doi/10.1111/jmi.12494/full" target="_blank" >http://onlinelibrary.wiley.com/doi/10.1111/jmi.12494/full</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1111/jmi.12494" target="_blank" >10.1111/jmi.12494</a>
Alternative languages
Result language
angličtina
Original language name
A stand-alone compact EUV microscope based on gas-puff target source
Original language description
We report on a very compact desk-top transmission extreme ultraviolet (EUV) microscope based on a laser-plasma source with a double stream gas-puff target, capable of acquiring magnified images of objects with a spatial (half-pitch) resolution of sub-50 nm. A multilayer ellipsoidal condenser is used to focus and spectrally narrow the radiation from the plasma, producing a quasi-monochromatic EUV radiation (λ = 13.8 nm) illuminating the object, whereas a Fresnel zone plate objective forms the image. Design details, development, characterization and optimization of the EUV source and the microscope are described and discussed. Test object and other samples were imaged to demonstrate superior resolution compared to visible light microscopy.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
—
Continuities
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Journal of Microscopy
ISSN
0022-2720
e-ISSN
1365-2818
Volume of the periodical
265
Issue of the periodical within the volume
2
Country of publishing house
GB - UNITED KINGDOM
Number of pages
10
Pages from-to
251-260
UT code for WoS article
000394908800012
EID of the result in the Scopus database
2-s2.0-84991822104