Soft x-ray imaging with incoherent sources

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21460%2F17%3A00313264" target="_blank" >RIV/68407700:21460/17:00313264 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1117/12.2265093" target="_blank" >http://dx.doi.org/10.1117/12.2265093</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1117/12.2265093" target="_blank" >10.1117/12.2265093</a>

Result language
angličtina
Original language name
Soft x-ray imaging with incoherent sources
Original language description
In this work we present experimental, compact desk-top SXR microscope, the EUV microscope which is at this stage a technology demonstrator, and finally, the SXR contact microscope. The systems are based on laser-plasma EUV and SXR sources, employing a double stream gas puff target. The EUV and SXR full field microscopes, operating at 13.8 nm and 2.88 nm wavelengths, respectively, are capable of imaging nanostmctures with a sub-50 nm spatial resolution with relatively short (seconds) exposure times. The SXR contact microscope operates in the "water-window" spectral range, to produce an imprint of the internal structure of the sample in a thin layer of SXR light sensitive photoresist. Applications of such desk-top EUV and SXR microscopes for studies of variety of different samples test objects for resolution assessment and other objects such as carbon membranes, DNA plasmid samples, organic and inorganic thin layers, diatoms, algae and carcinoma cells, are also presented. Details about the sources, the microscopes as well as the imaging results for various objects will be presented and discussed. The development of such compact imaging systems may be important to the new research related to biological, material science and nanotechnology applications.
Czech name
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Czech description
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Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
X-ray Lasers and Coherent X-ray Sources: Development and Applications
ISBN
978-1-5106-0987-7
ISSN
0277-786X
e-ISSN
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Number of pages
9
Pages from-to
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Publisher name
SPIE
Place of publication
Baltimore
Event location
Praha
Event date
Apr 24, 2017
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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