HYDROGEN PLASMA TREATMENT OF ZNO THIN FILMS

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21460%2F17%3A00363010" target="_blank" >RIV/68407700:21460/17:00363010 - isvavai.cz</a>

Alternative codes found

RIV/68378271:_____/17:00478353

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

HYDROGEN PLASMA TREATMENT OF ZNO THIN FILMS

Original language description

ZnO is an attractive wide band gap semiconductor with large exciton binding energy, high refractive index, high biocompatibility and diversety of nanostructure shapes which makes it suitable for many applications in the optoelectronic devices, optical sensors, and biosensors. We study the effect of hydrogen plasma treatment of the nominally undoped ZnO thin film deposited by DC reactive magnetron sputtering of Zn target in the gas mixture of argon and oxygen plasma. The SEM images show that the crystal size increases with film thickness. We confirm, that the electrical conductivity significantly increases after hydrogen plasma treatment by 4 orders of magnitude. Moreover, the increase of the infrared optical absorption, related to free carrier concentration, was detected below the optical absorption edge by the photothermal deflection spectroscopy.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

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OECD FORD branch

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project

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Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2017

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

NANOCON 2016 - Conference Proceedings, 8th International Conference on Nanomaterials - Research and Application

ISBN

978-80-87294-71-0

ISSN

2694-930X

e-ISSN

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Number of pages

5

Pages from-to

161-165

Publisher name

TANGER

Place of publication

Ostrava

Event location

Brno

Event date

Oct 19, 2016

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

000410656100027