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Energy distribution functions of ions impinging on substrate in microwave plasma
Energy distribution functions of ions impinging on substrate in microwave plasma...
BL - Fyzika plasmatu a výboje v plynech
- 2004 •
- Jx
Rok uplatnění
Jx - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
Gaussian energy distribution of fast ions emitted by laser-produced plasmas
The analysis of ion collector signals with the use of a time-of-fight signal function derived from a shifted Maxwell?Boltzmann velocity distribution is used to quantify the ion characteristics as the ion t...
BL - Fyzika plasmatu a výboje v plynech
- 2013 •
- Jx •
- Link
Rok uplatnění
Jx - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
Výsledek na webu
Equipment for measuring and controlling the homogeneity of the ionic energy distribution function and the size of ion fluxes on the substrate during the deposition of dielectric optical thin films
The new technical solution of the ion probe enables the measurement of the ion distribution function and its spatial homogeneity even in the deposition reactive plasma, where the probe components are covered with a...
Fluids and plasma physics (including surface physics)
- 2021 •
- Fuzit •
- Link
Rok uplatnění
Fuzit - Užitný vzor
Výsledek na webu
Chamber with inverted electrode geometry for measuring and control of ion flux-energy distribution functions
Measurements of the ion flux-energy distribution functions with an energy are presented for a variety of conditions and ions. The potential for suppressing low-energy ions from r...
Condensed matter physics (including formerly solid state physics, supercond.)
- 2022 •
- O •
- Link
Rok uplatnění
O - Ostatní výsledky
Výsledek na webu
Electron denstity and electron energy distribution functions in dual-mode microwave/radio frequency plasmas in argon and nitrogen
measurements with values calculated from the ion energy distribution functions and ion-like electron distribution functions were found for both MW and MW/RF argon plasmas, while the ...
BL - Fyzika plasmatu a výboje v plynech
- 2001 •
- D
Rok uplatnění
D - Stať ve sborníku
Energy Dependence of the Sensitivity of an Ion Energy and Mass Spectrometer
function of an ion energy and mass spectrometer (Plasma Process Monitor PPM 421, Balzers). Firstly, the energy dependence of the critical angle for ions impinging enabling the ion to go through t...
BL - Fyzika plasmatu a výboje v plynech
- 2006 •
- Jx
Rok uplatnění
Jx - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
Simulation studies on laser ion acceleration in micro-structured targets and larger multispecies clusters
in proton energy distribution function at maximum energy. significantly boost energy absorption of intense laser pulses with ultra-high contrast and increase hot electron temperature and density. This res...
BL - Fyzika plasmatu a výboje v plynech
- 2011 •
- D •
- Link
Rok uplatnění
D - Stať ve sborníku
Výsledek na webu
A method for measuring the ion distribution function in a low temperature plasma, a measuring system for implementing the method and the probe for measuring system
A method for measuring the ion distribution function in a low temperature from which the evaluation of the control and measuring unit fixed ion distribution function of the plasma source. Furtherm...
BH - Optika, masery a lasery
- 2014 •
- P •
- Link
Rok uplatnění
P - Patent
Výsledek na webu
Investigations of laser-produced Al plasma at laser intensities 101 3 - 101 5 W/cm2.
Laser plasma is a source of multicharged ions. The energy and charge carried by ions and their angular distributions as well as the electron temperature and energy partition between thermal and fast io...
BL - Fyzika plasmatu a výboje v plynech
- 1993 •
- D
Rok uplatnění
D - Stať ve sborníku
Ion energy distributions and efficiency of sputtering process in HIPIMS system
on the energy distribution of individual ions and the composition of total ion fluxes over and 2.7 Pa. The strong effect of the working gas pressure on the ion energy distribution wassho...
BL - Fyzika plasmatu a výboje v plynech
- 2008 •
- Jx
Rok uplatnění
Jx - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
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