A long-range scanning probe microscope for automotive reflector optical quality inspection

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F11%3A%230000383" target="_blank" >RIV/00177016:_____/11:#0000383 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1088/0957-0233/22/9/094011" target="_blank" >http://dx.doi.org/10.1088/0957-0233/22/9/094011</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/0957-0233/22/9/094011" target="_blank" >10.1088/0957-0233/22/9/094011</a>

Jazyk výsledku

angličtina

Název v původním jazyce

A long-range scanning probe microscope for automotive reflector optical quality inspection

Popis výsledku v původním jazyce

A long-range scanning probe microscope (SPM) designed for the measurement of micro-and nanoscale forms, roughness and surface defects was constructed. It is based on commercial crossed roller bearing stages combined with piezoceramic actuators used to compensate the imperfections of the bearing mechanism. Three interferometers are used for all three-axis translation monitoring and feedback. For stage rotation monitoring (axis normal to the sample surface), an autocollimator is used. For nonplanarity compensation and two more axis rotation compensations (axes parallel to sample surface), an optical quality reference plane and a set of tunneling current sensors are used. The developed system enables us to perform large-scale measurements of the surface form with no influence of positioning system non-planarities and piezoceramic component hysteresis. In contrast to specialized metrology systems, e. g. using a six-axis interferometer for stage motion monitoring and feedback, this approach

Název v anglickém jazyce

A long-range scanning probe microscope for automotive reflector optical quality inspection

Popis výsledku anglicky

A long-range scanning probe microscope (SPM) designed for the measurement of micro-and nanoscale forms, roughness and surface defects was constructed. It is based on commercial crossed roller bearing stages combined with piezoceramic actuators used to compensate the imperfections of the bearing mechanism. Three interferometers are used for all three-axis translation monitoring and feedback. For stage rotation monitoring (axis normal to the sample surface), an autocollimator is used. For nonplanarity compensation and two more axis rotation compensations (axes parallel to sample surface), an optical quality reference plane and a set of tunneling current sensors are used. The developed system enables us to perform large-scale measurements of the surface form with no influence of positioning system non-planarities and piezoceramic component hysteresis. In contrast to specialized metrology systems, e. g. using a six-axis interferometer for stage motion monitoring and feedback, this approach

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

<a href="/cs/project/FT-TA5%2F114" target="_blank" >FT-TA5/114: Vývoj technologie vytváření PECVD vrstev pro výrobu automobilové světelné techniky</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2011

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Measurement Science and Technology

ISSN

0957-0233

e-ISSN

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Svazek periodika

22

Číslo periodika v rámci svazku

9

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

7

Strana od-do

094011-094017

Kód UT WoS článku

000294764800012

EID výsledku v databázi Scopus

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