Intercomparison of flatness measurements of an optical flat at apertures of up to 150 mm in diameter

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F17%3AN0000001" target="_blank" >RIV/00177016:_____/17:N0000001 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1088/1681-7575/aa535c" target="_blank" >http://dx.doi.org/10.1088/1681-7575/aa535c</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/1681-7575/aa535c" target="_blank" >10.1088/1681-7575/aa535c</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Intercomparison of flatness measurements of an optical flat at apertures of up to 150 mm in diameter

Popis výsledku v původním jazyce

Recently, a scientific comparison of flatness measuring instruments at European National Metrology Institutes (NMIs) was performed in the framework of EURAMET. The specimen was a well-polished optical surface with a maximum measurement aperture of 150 mm in diameter. Here, we present an evaluation concept, which allows the determination of a mean flatness map taking into account different lateral resolutions of the instruments and different orientations of the specimen during measurement. We found that all measurements are in agreement with the mean flatness map within the uncertainty intervals stated by the participants. The aim of this scientific comparison is to specify an appropriate operation and evaluation procedure for future comparisons.

Název v anglickém jazyce

Intercomparison of flatness measurements of an optical flat at apertures of up to 150 mm in diameter

Popis výsledku anglicky

Recently, a scientific comparison of flatness measuring instruments at European National Metrology Institutes (NMIs) was performed in the framework of EURAMET. The specimen was a well-polished optical surface with a maximum measurement aperture of 150 mm in diameter. Here, we present an evaluation concept, which allows the determination of a mean flatness map taking into account different lateral resolutions of the instruments and different orientations of the specimen during measurement. We found that all measurements are in agreement with the mean flatness map within the uncertainty intervals stated by the participants. The aim of this scientific comparison is to specify an appropriate operation and evaluation procedure for future comparisons.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

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OECD FORD obor

10306 - Optics (including laser optics and quantum optics)

Projekt

—

Návaznosti

V - Vyzkumna aktivita podporovana z jinych verejnych zdroju

Rok uplatnění

2017

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Metrologia

ISSN

0026-1394

e-ISSN

—

Svazek periodika

54

Číslo periodika v rámci svazku

1

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

8

Strana od-do

85-93

Kód UT WoS článku

000394508900002

EID výsledku v databázi Scopus

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