Linking the optical and the mechanical measurements of dimension by a Newton’s rings method

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F19%3AN0000002" target="_blank" >RIV/00177016:_____/19:N0000002 - isvavai.cz</a>

Výsledek na webu

<a href="https://iopscience.iop.org/article/10.1088/1681-7575/ab00ae/meta" target="_blank" >https://iopscience.iop.org/article/10.1088/1681-7575/ab00ae/meta</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/1681-7575/ab00ae" target="_blank" >10.1088/1681-7575/ab00ae</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Linking the optical and the mechanical measurements of dimension by a Newton’s rings method

Popis výsledku v původním jazyce

Optical (e.g. interferometric or laser focus probe) measurement of dimensions must be corrected to take into account phase change on reflection and the influence of surface roughness in order to be compatible with mechanical dimension measurement methods (e.g. tactile probes). One typical example is interferometric measurement of a gauge block; while a correction of only a few nanometres is needed for standard interferometric measurement of a gauge block wrung on a platen made of the same material, a correction of tens of nanometres is needed when different materials are used (e.g. a steel gauge block on a glass platen) and even a total correction of up to a hundred nanometres is needed for some gauges when a double-ended interferometer is used. Here we describe and evaluate a Newton's rings method that enables direct estimation of such correction. The implementation of this method is described, the sensitivities to experimental adjustments are discussed, and the results are compared with standard measurements within EURAMET project No. 1272. The resulting central length measured with a double-ended interferometer and corrected using the Newton's rings method agrees well with the standard measurement results within a total uncertainty of 20 nm for both steel and ceramic gauges. Unlike the stack method, the Newton's rings method enables measurement of the correction for an individual sample (e.g. gauge block) and can easily be done for both short and long gauges with equal speed and uncertainty.

Název v anglickém jazyce

Linking the optical and the mechanical measurements of dimension by a Newton’s rings method

Popis výsledku anglicky

Optical (e.g. interferometric or laser focus probe) measurement of dimensions must be corrected to take into account phase change on reflection and the influence of surface roughness in order to be compatible with mechanical dimension measurement methods (e.g. tactile probes). One typical example is interferometric measurement of a gauge block; while a correction of only a few nanometres is needed for standard interferometric measurement of a gauge block wrung on a platen made of the same material, a correction of tens of nanometres is needed when different materials are used (e.g. a steel gauge block on a glass platen) and even a total correction of up to a hundred nanometres is needed for some gauges when a double-ended interferometer is used. Here we describe and evaluate a Newton's rings method that enables direct estimation of such correction. The implementation of this method is described, the sensitivities to experimental adjustments are discussed, and the results are compared with standard measurements within EURAMET project No. 1272. The resulting central length measured with a double-ended interferometer and corrected using the Newton's rings method agrees well with the standard measurement results within a total uncertainty of 20 nm for both steel and ceramic gauges. Unlike the stack method, the Newton's rings method enables measurement of the correction for an individual sample (e.g. gauge block) and can easily be done for both short and long gauges with equal speed and uncertainty.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10306 - Optics (including laser optics and quantum optics)

Projekt

—

Návaznosti

N - Vyzkumna aktivita podporovana z neverejnych zdroju

Rok uplatnění

2019

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Metrologia

ISSN

0026-1394

e-ISSN

—

Svazek periodika

56

Číslo periodika v rámci svazku

2

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

13

Strana od-do

—

Kód UT WoS článku

000460821000002

EID výsledku v databázi Scopus

2-s2.0-85067265015