Multiple-fibre interferometry setup for probe sample interaction measurements in atomic force microscopy

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F20%3AN0000037" target="_blank" >RIV/00177016:_____/20:N0000037 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68081731:_____/20:00531672 RIV/00177016:_____/20:N0000039 RIV/00216224:14740/20:00118334 RIV/00216305:26620/20:PU139278

Výsledek na webu

<a href="https://iopscience.iop.org/article/10.1088/1361-6501/ab85d8" target="_blank" >https://iopscience.iop.org/article/10.1088/1361-6501/ab85d8</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/1361-6501/ab85d8" target="_blank" >10.1088/1361-6501/ab85d8</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Multiple-fibre interferometry setup for probe sample interaction measurements in atomic force microscopy

Popis výsledku v původním jazyce

Atomic force microscopy (AFM) often relies on the assumption that cantilever bending can be described by simple beam theory and that the displacement of the tip can be evaluated from the cantilever angle. Some more advanced metrological instruments use free-space or fibre interferometers for measuring the position of the cantilever apex directly, thereby simplifying the metrology traceability chain. The next logical development, covering measurements of both the cantilever apex position and its deformation due to lateral forces acting during different AFM measurement regimes, is presented in this paper. It is based on using a set of closely packed fibre interferometers that can be used to determine localised bending of the cantilever at different positions along the cantilever. This can be used for detection of cantilever deformation beyond classical beam theory, and can yield both better understanding of sources of uncertainty in individual AFM force-distance measurements and more accurate scanning in constant height mode in high-speed AFM applications.

Název v anglickém jazyce

Multiple-fibre interferometry setup for probe sample interaction measurements in atomic force microscopy

Popis výsledku anglicky

Atomic force microscopy (AFM) often relies on the assumption that cantilever bending can be described by simple beam theory and that the displacement of the tip can be evaluated from the cantilever angle. Some more advanced metrological instruments use free-space or fibre interferometers for measuring the position of the cantilever apex directly, thereby simplifying the metrology traceability chain. The next logical development, covering measurements of both the cantilever apex position and its deformation due to lateral forces acting during different AFM measurement regimes, is presented in this paper. It is based on using a set of closely packed fibre interferometers that can be used to determine localised bending of the cantilever at different positions along the cantilever. This can be used for detection of cantilever deformation beyond classical beam theory, and can yield both better understanding of sources of uncertainty in individual AFM force-distance measurements and more accurate scanning in constant height mode in high-speed AFM applications.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

21100 - Other engineering and technologies

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2020

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Measurement Science and Technology

ISSN

0957-0233

e-ISSN

1361-6501

Svazek periodika

31

Číslo periodika v rámci svazku

9

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

11

Strana od-do

—

Kód UT WoS článku

000544634400001

EID výsledku v databázi Scopus

2-s2.0-85087152351