Non-destructive Depth Profiling of the Activated Ti-Zr-V Getter by Means of Excitation Energy Resolved Photoelectron Spectroscopy

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F10%3A10070074" target="_blank" >RIV/00216208:11320/10:10070074 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/61388955:_____/10:00343393

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Non-destructive Depth Profiling of the Activated Ti-Zr-V Getter by Means of Excitation Energy Resolved Photoelectron Spectroscopy

Popis výsledku v původním jazyce

Non-evaporable Ti-Zr-V ternary getters (NEGs) were studied by means of excitation energy resolved photoelectron spectroscopy (ERXPS). We attempted a quantitative study of the in-depth redistribution of the NEG components during activation. The samples were prepared ex-situ by DC magnetron sputtering on a stainless-steel substrate. The ERXPS measurements were carried out at various energies. Besides that, also standard X-ray photoelectron spectroscopy was used. We accumulated Ti, V, Zr, C and O photoelectron peak intensities as functions of the kinetic energies given to them. Under simplifying assumptions, Monte-Carlo calculations of the activated sample concentration profiles were performed to fit the measured spectra intensities. The results proved the in-depth redistribution of the components during the activation process. This way we also contributed to further development of non-destructive depth profiling by electron spectroscopy techniques.

Název v anglickém jazyce

Non-destructive Depth Profiling of the Activated Ti-Zr-V Getter by Means of Excitation Energy Resolved Photoelectron Spectroscopy

Popis výsledku anglicky

Non-evaporable Ti-Zr-V ternary getters (NEGs) were studied by means of excitation energy resolved photoelectron spectroscopy (ERXPS). We attempted a quantitative study of the in-depth redistribution of the NEG components during activation. The samples were prepared ex-situ by DC magnetron sputtering on a stainless-steel substrate. The ERXPS measurements were carried out at various energies. Besides that, also standard X-ray photoelectron spectroscopy was used. We accumulated Ti, V, Zr, C and O photoelectron peak intensities as functions of the kinetic energies given to them. Under simplifying assumptions, Monte-Carlo calculations of the activated sample concentration profiles were performed to fit the measured spectra intensities. The results proved the in-depth redistribution of the components during the activation process. This way we also contributed to further development of non-destructive depth profiling by electron spectroscopy techniques.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)<br>S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2010

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Analytical Sciences

ISSN

0910-6340

e-ISSN

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Svazek periodika

26

Číslo periodika v rámci svazku

2

Stát vydavatele periodika

JP - Japonsko

Počet stran výsledku

7

Strana od-do

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Kód UT WoS článku

000274977700012

EID výsledku v databázi Scopus

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