2D MoSe2 Structures Prepared by Atomic Layer Deposition

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F18%3A10425678" target="_blank" >RIV/00216208:11320/18:10425678 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/00216275:25310/18:39912663 RIV/00216305:26620/18:PU127552

Výsledek na webu

<a href="https://verso.is.cuni.cz/pub/verso.fpl?fname=obd_publikace_handle&handle=mwjL8.6dIW" target="_blank" >https://verso.is.cuni.cz/pub/verso.fpl?fname=obd_publikace_handle&handle=mwjL8.6dIW</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1002/pssr.201800023" target="_blank" >10.1002/pssr.201800023</a>

Jazyk výsledku

angličtina

Název v původním jazyce

2D MoSe2 Structures Prepared by Atomic Layer Deposition

Popis výsledku v původním jazyce

Here, we demonstrate the preparation of 2D MoSe2 structures by the atomic layer deposition technique. In this work, we use ((CH3)(3)Si)(2)Se as the Se precursor and Mo(CO)(6) or MoCl5 as the Mo precursors. The X-ray photoelectron spectroscopy (XPS) analyses of the prepared samples have revealed that using the MoCl5 precursor the obtained structure of MoSe2 is nearly identical to the reference powder MoSe2 sample while the composition of the sample prepared from Mo(CO)(6) contains a significant amount of oxygen atoms. Further inspection of as-deposited samples via scanning electron microscopy (SEM), X-ray diffraction (XRD), and Raman spectroscopy has disclosed that the MoSe2 structure based on MoCl5 is formed from randomly oriented well crystalline flakes with their size approximate to 100nm in contrast to the Mo-Se-O compact film originating from Mo(CO)(6).

Název v anglickém jazyce

2D MoSe2 Structures Prepared by Atomic Layer Deposition

Popis výsledku anglicky

Here, we demonstrate the preparation of 2D MoSe2 structures by the atomic layer deposition technique. In this work, we use ((CH3)(3)Si)(2)Se as the Se precursor and Mo(CO)(6) or MoCl5 as the Mo precursors. The X-ray photoelectron spectroscopy (XPS) analyses of the prepared samples have revealed that using the MoCl5 precursor the obtained structure of MoSe2 is nearly identical to the reference powder MoSe2 sample while the composition of the sample prepared from Mo(CO)(6) contains a significant amount of oxygen atoms. Further inspection of as-deposited samples via scanning electron microscopy (SEM), X-ray diffraction (XRD), and Raman spectroscopy has disclosed that the MoSe2 structure based on MoCl5 is formed from randomly oriented well crystalline flakes with their size approximate to 100nm in contrast to the Mo-Se-O compact film originating from Mo(CO)(6).

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

—

Návaznosti

—

Rok uplatnění

2018

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Physica Status Solidi - Rapid Research Letetrs

ISSN

1862-6254

e-ISSN

—

Svazek periodika

12

Číslo periodika v rámci svazku

5

Stát vydavatele periodika

DE - Spolková republika Německo

Počet stran výsledku

4

Strana od-do

1800023

Kód UT WoS článku

000433591900004

EID výsledku v databázi Scopus

2-s2.0-85048056037