Diagnostics of He+N2+CO2 Plasmas in Non-segmented Cylindrical Cathode Magnetron by DC Supply

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F22%3A10457031" target="_blank" >RIV/00216208:11320/22:10457031 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.mff.cuni.cz/veda/konference/wds/proc/pdf22/WDS22_12_f2_Mishra.pdf" target="_blank" >https://www.mff.cuni.cz/veda/konference/wds/proc/pdf22/WDS22_12_f2_Mishra.pdf</a>

DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Diagnostics of He+N2+CO2 Plasmas in Non-segmented Cylindrical Cathode Magnetron by DC Supply

Popis výsledku v původním jazyce

We measured plasma parameters (excitation temperature, electron density, rotational and vibrational temperature) in non-segmented cylindrical cathode magnetron by optical emission spectroscopy (OES). Admixture of He+N2+CO2 gases in ratios of 3:2:1 is deployed for plasma study by means of OES diagnostics in a regime of the magnetic field. The objective of study is to understand effect of the gas mixture He+N2+CO2 on plasma parameters. The rotational temperature (Trot), vibrational temperature (Tvib), and electron density (ne) were calculated using spectral lines which were obtained through OES. This work also aims to investigate the validity of the excitation temperature (Texc) by OES as an alternative to the electron temperature (Te). The whole results of emission spectroscopy in a mixture of He+N2+CO2 are analyzed by changing magnetic field (in Tesla), current (in mA), pressure (Pa), keeping flow rate (sccm) constant.

Název v anglickém jazyce

Diagnostics of He+N2+CO2 Plasmas in Non-segmented Cylindrical Cathode Magnetron by DC Supply

Popis výsledku anglicky

We measured plasma parameters (excitation temperature, electron density, rotational and vibrational temperature) in non-segmented cylindrical cathode magnetron by optical emission spectroscopy (OES). Admixture of He+N2+CO2 gases in ratios of 3:2:1 is deployed for plasma study by means of OES diagnostics in a regime of the magnetic field. The objective of study is to understand effect of the gas mixture He+N2+CO2 on plasma parameters. The rotational temperature (Trot), vibrational temperature (Tvib), and electron density (ne) were calculated using spectral lines which were obtained through OES. This work also aims to investigate the validity of the excitation temperature (Texc) by OES as an alternative to the electron temperature (Te). The whole results of emission spectroscopy in a mixture of He+N2+CO2 are analyzed by changing magnetic field (in Tesla), current (in mA), pressure (Pa), keeping flow rate (sccm) constant.

Druh

D - Stať ve sborníku

CEP obor

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OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

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Návaznosti

S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2022

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

WDS&apos;22 Proceedings of Contributed Papers — Physics

ISBN

978-80-7378-477-5

ISSN

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e-ISSN

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Počet stran výsledku

8

Strana od-do

89-96

Název nakladatele

Matfyzpress

Místo vydání

Praha

Místo konání akce

Praha

Datum konání akce

7. 6. 2022

Typ akce podle státní příslušnosti

EUR - Evropská akce

Kód UT WoS článku

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