Závislost citlivosti hmotnostního a energiového spektrometru na energii iontů

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F06%3A00015755" target="_blank" >RIV/00216224:14310/06:00015755 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68081731:_____/06:00086162

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Energy Dependence of the Sensitivity of an Ion Energy and Mass Spectrometer

Popis výsledku v původním jazyce

The aim of this work was to estimate the energy dependence of the transmission function of an ion energy and mass spectrometer (Plasma Process Monitor PPM 421, Balzers). Firstly, the energy dependence of the critical angle for ions impinging on an orifice in the extraction hood was calculated. The critical angle is defined as the largest angle between the ion velocity and the optical axis of the entry ion optics enabling the ion to go through the entry optics into the energy analyzer. For the calculation the programs ELD and TRASYS were used. The transmission of the entry ion optics was evaluated by integrating the ion angle distribution (IAD) up to the critical angle. Since the IADs are usually not known, an approximate method for the IAD estimation was suggested. The method suppose that the ion velocity component perpendicular to the optical axis has Maxwell distribution and the longitudinal velocity component is increased in the sheath. It is suitable for low-pressure discharges, wh

Název v anglickém jazyce

Energy Dependence of the Sensitivity of an Ion Energy and Mass Spectrometer

Popis výsledku anglicky

The aim of this work was to estimate the energy dependence of the transmission function of an ion energy and mass spectrometer (Plasma Process Monitor PPM 421, Balzers). Firstly, the energy dependence of the critical angle for ions impinging on an orifice in the extraction hood was calculated. The critical angle is defined as the largest angle between the ion velocity and the optical axis of the entry ion optics enabling the ion to go through the entry optics into the energy analyzer. For the calculation the programs ELD and TRASYS were used. The transmission of the entry ion optics was evaluated by integrating the ion angle distribution (IAD) up to the critical angle. Since the IADs are usually not known, an approximate method for the IAD estimation was suggested. The method suppose that the ion velocity component perpendicular to the optical axis has Maxwell distribution and the longitudinal velocity component is increased in the sheath. It is suitable for low-pressure discharges, wh

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

<a href="/cs/project/GD202%2F03%2FH162" target="_blank" >GD202/03/H162: Pokročilé směry ve fyzice a chemii plazmatu</a><br>

Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2006

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Czechoslovak Journal of Physics B

ISSN

0011-4626

e-ISSN

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Svazek periodika

56

Číslo periodika v rámci svazku

1

Stát vydavatele periodika

CZ - Česká republika

Počet stran výsledku

5

Strana od-do

702-706

Kód UT WoS článku

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EID výsledku v databázi Scopus

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