Studium RF výboje v neonu pomocí srážkově-radiačního modelu

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F08%3A00025162" target="_blank" >RIV/00216224:14310/08:00025162 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model

Popis výsledku v původním jazyce

A recently developed collisional-radiative (c-r) model for neon discharge was used to investigate the plasma properties of a capacitively coupled RF (13.56 MHz) discharge in neon. By means of c-r model, population of thirty excited states of neon atom and therefore optical emission spectrum for a given electron distribution function was determined. The discharge was studied by optical emission spectroscopy. By comparison of measured and calculated optical emission spectra on the basis of least-squares method the electron temperature or electron density was determined. The developed collisional-radiative model was refined in order to describe the studied plasma more correctly. Some important processes (as e.g. excitation transfer between 3s levels of neon atom induced by electron impact), were newly incorporated in the presented calculations. A 1/y-weighted sum of squares was used in the comparison of the spectra. Moreover, the model was modified in order to determine the emission coeff

Název v anglickém jazyce

Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model

Popis výsledku anglicky

A recently developed collisional-radiative (c-r) model for neon discharge was used to investigate the plasma properties of a capacitively coupled RF (13.56 MHz) discharge in neon. By means of c-r model, population of thirty excited states of neon atom and therefore optical emission spectrum for a given electron distribution function was determined. The discharge was studied by optical emission spectroscopy. By comparison of measured and calculated optical emission spectra on the basis of least-squares method the electron temperature or electron density was determined. The developed collisional-radiative model was refined in order to describe the studied plasma more correctly. Some important processes (as e.g. excitation transfer between 3s levels of neon atom induced by electron impact), were newly incorporated in the presented calculations. A 1/y-weighted sum of squares was used in the comparison of the spectra. Moreover, the model was modified in order to determine the emission coeff

Druh

D - Stať ve sborníku

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

<a href="/cs/project/GA202%2F06%2F0776" target="_blank" >GA202/06/0776: Pokročilý výzkum a vývoj zdrojů nízkoteplotního plazmatu</a><br>

Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2008

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Programme & Abstract Book of 23rd Symposium on Plasma Physics and Technology, Prague, Czech Republic, 13.-19.June 2008

ISBN

978-80-01-04030-0

ISSN

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e-ISSN

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Počet stran výsledku

1

Strana od-do

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Název nakladatele

ČVUT v Praze, Organizační výbor sympozia

Místo vydání

Praha

Místo konání akce

Praha

Datum konání akce

16. 6. 2008

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

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