Optical emission spectroscopy of RF plasma jet in neon/argon Penning mixture at atmospheric pressure

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F14%3A00076036" target="_blank" >RIV/00216224:14310/14:00076036 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Optical emission spectroscopy of RF plasma jet in neon/argon Penning mixture at atmospheric pressure

Popis výsledku v původním jazyce

A radio-frequency (RF, 27.12 MHz) capillary atmospheric pressure plasma jet in neon/argon Penning gas mixture (0 % - 3 % admixture of argon) was investigated by optical emission spectroscopy. The miniaturized plasma jets have been found advantageous in amaterials processing applications such as surface cleaning, surface activation, film deposition and sterilisation. One of the main advantages of these plasma sources is the possibility of localized and 3D treatment. In this work, the emission spectra were recorded in order to obtain information about the effect of quenching of neon excited atoms by argon with the increase of argon admixture. Further, the BOLSIG+ solver was used to calculate the electron mean energy and the rate coefficients for directexcitation of neon and argon levels for different Ne/Ar gas mixtures. The estimate of the reduced electric field strength according to these results was made.

Název v anglickém jazyce

Optical emission spectroscopy of RF plasma jet in neon/argon Penning mixture at atmospheric pressure

Popis výsledku anglicky

A radio-frequency (RF, 27.12 MHz) capillary atmospheric pressure plasma jet in neon/argon Penning gas mixture (0 % - 3 % admixture of argon) was investigated by optical emission spectroscopy. The miniaturized plasma jets have been found advantageous in amaterials processing applications such as surface cleaning, surface activation, film deposition and sterilisation. One of the main advantages of these plasma sources is the possibility of localized and 3D treatment. In this work, the emission spectra were recorded in order to obtain information about the effect of quenching of neon excited atoms by argon with the increase of argon admixture. Further, the BOLSIG+ solver was used to calculate the electron mean energy and the rate coefficients for directexcitation of neon and argon levels for different Ne/Ar gas mixtures. The estimate of the reduced electric field strength according to these results was made.

Druh

O - Ostatní výsledky

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2014

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů