Study of Ni doped nc-TiC/a-C(:H) coatings prepared by hybrid PVD-PECVD process

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F15%3A00081072" target="_blank" >RIV/00216224:14310/15:00081072 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Study of Ni doped nc-TiC/a-C(:H) coatings prepared by hybrid PVD-PECVD process

Popis výsledku v původním jazyce

Nanocomposite thin films, such as nanocrystalline titanium carbide embedded in an amorphous carbon matrix, nc-TiC/a-C(:H), are widely studied due their mechanical properties such as high hardness [1]. One of the main parameter which determines mechanicalproperties of nc-TiC/a-C(:H) coating system is the relative content of nanocrystalline and amorphous phases. A possible tool for influencing this parameter is selective doping of this system by a non-carbide forming element such as nickel, proposed by Lewin [2]. Hybrid PVD-PECVD process of sputtering titanium target in mixture of acetylene and argon was used to deposit superhard nc-TiC/a-C(:H) coatings [3]. For nickel doping of these coatings titanium-nickel (92.5 % Ti, 7.5 % Ni) target was used instead of pure titanium one. A sets of nickel free nc-TiC/a-C(:H) and Ni-dopped nc-TiC/a-C(:H) coatings were prepared and compared. For the determination of the influence of nickel doping several different analyses were used.

Název v anglickém jazyce

Study of Ni doped nc-TiC/a-C(:H) coatings prepared by hybrid PVD-PECVD process

Popis výsledku anglicky

Nanocomposite thin films, such as nanocrystalline titanium carbide embedded in an amorphous carbon matrix, nc-TiC/a-C(:H), are widely studied due their mechanical properties such as high hardness [1]. One of the main parameter which determines mechanicalproperties of nc-TiC/a-C(:H) coating system is the relative content of nanocrystalline and amorphous phases. A possible tool for influencing this parameter is selective doping of this system by a non-carbide forming element such as nickel, proposed by Lewin [2]. Hybrid PVD-PECVD process of sputtering titanium target in mixture of acetylene and argon was used to deposit superhard nc-TiC/a-C(:H) coatings [3]. For nickel doping of these coatings titanium-nickel (92.5 % Ti, 7.5 % Ni) target was used instead of pure titanium one. A sets of nickel free nc-TiC/a-C(:H) and Ni-dopped nc-TiC/a-C(:H) coatings were prepared and compared. For the determination of the influence of nickel doping several different analyses were used.

Druh

O - Ostatní výsledky

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2015

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů