Enhancement of electrical properties of flexible ITO/PET by atmospheric pressure roll-to-roll plasma

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F18%3A00102122" target="_blank" >RIV/00216224:14310/18:00102122 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.sciencedirect.com/science/article/pii/S1369800117319601" target="_blank" >https://www.sciencedirect.com/science/article/pii/S1369800117319601</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.mssp.2017.11.022" target="_blank" >10.1016/j.mssp.2017.11.022</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Enhancement of electrical properties of flexible ITO/PET by atmospheric pressure roll-to-roll plasma

Popis výsledku v původním jazyce

Flexible materials can significantly reduce the cost of the electronic devices because they can be manufactured by large-area roll-to-roll (R2R) processing. In this work, R2R atmospheric pressure plasma was used to modify flexible indium-tin-oxide films on polyethylene terephthalate foil (ITO/PET). Plasma treatment was performed in different feed gases consisting of various ratio between nitrogen and oxygen. A range of experimental techniques were used to study surface properties of ITO/PET, including X-ray and Ultraviolet photoelectron spectroscopies, four-point probe, Atomic force microscopy and UV–Vis measurement. We found that R2R plasma treatment decreased carbon contamination and increased the number of oxygen vacancies on the surface, whereas the ratio between indium and tin remained constant. UPS showed an increase in the work function from 3.9 eV for untreated sample to 5.1 eV for sample treated in plasma for very short time of 2 s.

Název v anglickém jazyce

Enhancement of electrical properties of flexible ITO/PET by atmospheric pressure roll-to-roll plasma

Popis výsledku anglicky

Flexible materials can significantly reduce the cost of the electronic devices because they can be manufactured by large-area roll-to-roll (R2R) processing. In this work, R2R atmospheric pressure plasma was used to modify flexible indium-tin-oxide films on polyethylene terephthalate foil (ITO/PET). Plasma treatment was performed in different feed gases consisting of various ratio between nitrogen and oxygen. A range of experimental techniques were used to study surface properties of ITO/PET, including X-ray and Ultraviolet photoelectron spectroscopies, four-point probe, Atomic force microscopy and UV–Vis measurement. We found that R2R plasma treatment decreased carbon contamination and increased the number of oxygen vacancies on the surface, whereas the ratio between indium and tin remained constant. UPS showed an increase in the work function from 3.9 eV for untreated sample to 5.1 eV for sample treated in plasma for very short time of 2 s.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

<a href="/cs/project/LO1411" target="_blank" >LO1411: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2018

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Materials Science in Semiconductor Processing

ISSN

1369-8001

e-ISSN

1873-4081

Svazek periodika

75

Číslo periodika v rámci svazku

N/A

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

8

Strana od-do

95-102

Kód UT WoS článku

000424934600013

EID výsledku v databázi Scopus

2-s2.0-85034778395