Optical characterization of inhomogeneous thin films containing transition layers using the combined method of spectroscopic ellipsometry and spectroscopic reflectometry based on multiple-beam interference model

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F19%3A00107920" target="_blank" >RIV/00216224:14310/19:00107920 - isvavai.cz</a>

Výsledek na webu

<a href="https://doi.org/10.1116/1.5122014" target="_blank" >https://doi.org/10.1116/1.5122014</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1116/1.5122014" target="_blank" >10.1116/1.5122014</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Optical characterization of inhomogeneous thin films containing transition layers using the combined method of spectroscopic ellipsometry and spectroscopic reflectometry based on multiple-beam interference model

Popis výsledku v původním jazyce

This paper presents the results of the optical characterization of inhomogeneous thin films of polymer-like SiOxCyHz and non-stoichiometric silicon nitride SiNx. An efficient method combining variable angle spectroscopic ellipsometry and spectroscopic reflectometry applied at the near-normal incidence based on the multiple-beam interference model is utilized for this optical characterization. The multiple-beam interference model allows us to quickly evaluate the values of ellipsometric parameters and reflectance of the inhomogeneous thin films, which exhibit general profiles of their optical constants. The spectral dependencies of the optical constants of the inhomogeneous SiOxCyHz and SiNx thin films are determined using the Campi–Coriasso dispersion model. The profiles of the optical constants of these films can also be determined. Furthermore, the transition layers at the lower boundaries of the characterized films are also taken into account. Spectral dependencies of the optical constants of these transition layers are also determined using the Campi–Coriasso dispersion model.

Název v anglickém jazyce

Optical characterization of inhomogeneous thin films containing transition layers using the combined method of spectroscopic ellipsometry and spectroscopic reflectometry based on multiple-beam interference model

Popis výsledku anglicky

This paper presents the results of the optical characterization of inhomogeneous thin films of polymer-like SiOxCyHz and non-stoichiometric silicon nitride SiNx. An efficient method combining variable angle spectroscopic ellipsometry and spectroscopic reflectometry applied at the near-normal incidence based on the multiple-beam interference model is utilized for this optical characterization. The multiple-beam interference model allows us to quickly evaluate the values of ellipsometric parameters and reflectance of the inhomogeneous thin films, which exhibit general profiles of their optical constants. The spectral dependencies of the optical constants of the inhomogeneous SiOxCyHz and SiNx thin films are determined using the Campi–Coriasso dispersion model. The profiles of the optical constants of these films can also be determined. Furthermore, the transition layers at the lower boundaries of the characterized films are also taken into account. Spectral dependencies of the optical constants of these transition layers are also determined using the Campi–Coriasso dispersion model.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10306 - Optics (including laser optics and quantum optics)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2019

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

ISSN

2166-2746

e-ISSN

2166-2754

Svazek periodika

37

Číslo periodika v rámci svazku

6

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

10

Strana od-do

„062921-1“-„062921-10“

Kód UT WoS článku

000522021700072

EID výsledku v databázi Scopus

2-s2.0-85074710641