Multi-hollow surface dielectric barrier discharge for plasma treatment of patterned silicon surfaces

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F19%3A00111180" target="_blank" >RIV/00216224:14310/19:00111180 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.sciencedirect.com/science/article/pii/S2468023018303948?via%3Dihub" target="_blank" >https://www.sciencedirect.com/science/article/pii/S2468023018303948?via%3Dihub</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfin.2019.01.014" target="_blank" >10.1016/j.surfin.2019.01.014</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Multi-hollow surface dielectric barrier discharge for plasma treatment of patterned silicon surfaces

Popis výsledku v původním jazyce

A novel mull-hollow surface dielectric barrier discharge (MSDBD) plasma source was used to generate atmospheric-pressure plasma in air. MSDBD generates plasma inside 105 holes within two parallel electrodes fully embedded inside robust alumina ceramics. The inner area of holes was also fully covered by the alumina ceramics and generated plasma was not in contact with high-voltage electrodes, which enables long-term stability of the electrode system and therefore practically "unlimited" lifetime. The MSDBD plasma was employed for modification of silicon surfaces at various distances ranging from 0.00 mm to 1.07 mm. The major advantage of the MSDBD plasma was in higher distances of the substrates from the ceramics surface. For instance, coplanar DBD enables effective distances ranging from 0.1 mm to 0.3 mm. A range of experimental techniques was employed to study the efficiency of MSDBD plasma treatment on silicon surface including surface energy measurement, X-ray photoelectron spectroscopy and Atomic force microscopy. It was found that silicon surfaces can be effectively modified by MSDBD plasma, even at a distance of 1 mm, allowing plasma treatment of patterned silicon surfaces used in various fields, e.g. microfluidics.

Název v anglickém jazyce

Multi-hollow surface dielectric barrier discharge for plasma treatment of patterned silicon surfaces

Popis výsledku anglicky

A novel mull-hollow surface dielectric barrier discharge (MSDBD) plasma source was used to generate atmospheric-pressure plasma in air. MSDBD generates plasma inside 105 holes within two parallel electrodes fully embedded inside robust alumina ceramics. The inner area of holes was also fully covered by the alumina ceramics and generated plasma was not in contact with high-voltage electrodes, which enables long-term stability of the electrode system and therefore practically "unlimited" lifetime. The MSDBD plasma was employed for modification of silicon surfaces at various distances ranging from 0.00 mm to 1.07 mm. The major advantage of the MSDBD plasma was in higher distances of the substrates from the ceramics surface. For instance, coplanar DBD enables effective distances ranging from 0.1 mm to 0.3 mm. A range of experimental techniques was employed to study the efficiency of MSDBD plasma treatment on silicon surface including surface energy measurement, X-ray photoelectron spectroscopy and Atomic force microscopy. It was found that silicon surfaces can be effectively modified by MSDBD plasma, even at a distance of 1 mm, allowing plasma treatment of patterned silicon surfaces used in various fields, e.g. microfluidics.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

<a href="/cs/project/LO1411" target="_blank" >LO1411: Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2019

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Surfaces and Interfaces

ISSN

2468-0230

e-ISSN

—

Svazek periodika

16

Číslo periodika v rámci svazku

September

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

7

Strana od-do

181-187

Kód UT WoS článku

000474567500025

EID výsledku v databázi Scopus

2-s2.0-85067953998