Process-induced inhomogeneities in higher asymmetry angle X-ray monochromators

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14740%2F13%3A00070947" target="_blank" >RIV/00216224:14740/13:00070947 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1117/12.2025142" target="_blank" >http://dx.doi.org/10.1117/12.2025142</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1117/12.2025142" target="_blank" >10.1117/12.2025142</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Process-induced inhomogeneities in higher asymmetry angle X-ray monochromators

Popis výsledku v původním jazyce

Beam inhomogeneities of asymmetric Ge(220)-based V-shaped and single bounce monochromators have been studied both in metrological and imaging applications for photon energies around 8 keV. Presence of growth striations in graded GeSi, grains in single Cucrystal, and strains in thermally tuned V-channel monochromators observed in X-ray topographs excludes these materials from imaging applications. As for stochastic surface processing, chemomechanical polishing (CMP) produces better surface homogeneity than chemical polish. However, CMP is more difficult to be applied in V-channels, where chemical polishing is prefered. For comparison, measurements on surfaces processed by a deterministic mechanical method of single point diamond turning (SPDT) have shown SPDT to be a perspective technology. Again, to prepare deep grooves with this technique is also a challenge, mainly for tool makers. Some process induced features are observed as wavefield distortions in interference fringes.

Název v anglickém jazyce

Process-induced inhomogeneities in higher asymmetry angle X-ray monochromators

Popis výsledku anglicky

Beam inhomogeneities of asymmetric Ge(220)-based V-shaped and single bounce monochromators have been studied both in metrological and imaging applications for photon energies around 8 keV. Presence of growth striations in graded GeSi, grains in single Cucrystal, and strains in thermally tuned V-channel monochromators observed in X-ray topographs excludes these materials from imaging applications. As for stochastic surface processing, chemomechanical polishing (CMP) produces better surface homogeneity than chemical polish. However, CMP is more difficult to be applied in V-channels, where chemical polishing is prefered. For comparison, measurements on surfaces processed by a deterministic mechanical method of single point diamond turning (SPDT) have shown SPDT to be a perspective technology. Again, to prepare deep grooves with this technique is also a challenge, mainly for tool makers. Some process induced features are observed as wavefield distortions in interference fringes.

Druh

D - Stať ve sborníku

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

<a href="/cs/project/ED1.1.00%2F02.0068" target="_blank" >ED1.1.00/02.0068: CEITEC - central european institute of technology</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)<br>S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2013

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Advances in X-Ray/EUV Optics and Components VIII

ISBN

9780819496980

ISSN

0277-786X

e-ISSN

—

Počet stran výsledku

8

Strana od-do

"88480U-1-88480U-8"

Název nakladatele

SPIE-INT SOC OPTICAL ENGINEERING

Místo vydání

USA

Místo konání akce

San Diego

Datum konání akce

26. 8. 2013

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

000326748800024