Ablation of binary As2S3, As2Se3, GeS2, GeSe2 and GeSe3 bulk glasses and thin films with a deep ultraviolet nanosecond laser

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216275%3A25310%2F21%3A39917362" target="_blank" >RIV/00216275:25310/21:39917362 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/00216224:14310/21:00121664

Výsledek na webu

<a href="https://www.sciencedirect.com/science/article/pii/S0169433221006589" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0169433221006589</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.apsusc.2021.149582" target="_blank" >10.1016/j.apsusc.2021.149582</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Ablation of binary As2S3, As2Se3, GeS2, GeSe2 and GeSe3 bulk glasses and thin films with a deep ultraviolet nanosecond laser

Popis výsledku v původním jazyce

Binary (As2S3, As2Se3, GeS2 GeSe2 and GeSe3) bulk glasses and corresponding thin films were prepared and illuminated with deep ultraviolet nanosecond (DUV ns) pulsed laser operating at 213 nm. The illumination of samples led to the reproducible crater&apos;s formation. Subsequently, the influence of the pulses number and laser fluence on their creation was studied. The ablation rate and laser-induced ablation threshold (LIAT) were determined based on these experiments. The craters with the help of digital holographic microscopy (DHM), atomic force microscopy (AFM), phase shift imaging mode of AFM, Raman scattering, scanning electron microscopy and energy-dispersive X-ray spectroscopy were characterized. As an application possibility, the formation of the diffraction gratings by laser direct writing is presented and their functionality is demonstrated.

Název v anglickém jazyce

Ablation of binary As2S3, As2Se3, GeS2, GeSe2 and GeSe3 bulk glasses and thin films with a deep ultraviolet nanosecond laser

Popis výsledku anglicky

Binary (As2S3, As2Se3, GeS2 GeSe2 and GeSe3) bulk glasses and corresponding thin films were prepared and illuminated with deep ultraviolet nanosecond (DUV ns) pulsed laser operating at 213 nm. The illumination of samples led to the reproducible crater&apos;s formation. Subsequently, the influence of the pulses number and laser fluence on their creation was studied. The ablation rate and laser-induced ablation threshold (LIAT) were determined based on these experiments. The craters with the help of digital holographic microscopy (DHM), atomic force microscopy (AFM), phase shift imaging mode of AFM, Raman scattering, scanning electron microscopy and energy-dispersive X-ray spectroscopy were characterized. As an application possibility, the formation of the diffraction gratings by laser direct writing is presented and their functionality is demonstrated.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10402 - Inorganic and nuclear chemistry

Projekt

<a href="/cs/project/GA19-11814S" target="_blank" >GA19-11814S: Přímý zápis laserem do vysoko-indexových skel</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2021

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Applied Surface Science

ISSN

0169-4332

e-ISSN

—

Svazek periodika

554

Číslo periodika v rámci svazku

July

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

12

Strana od-do

149582

Kód UT WoS článku

000647740600005

EID výsledku v databázi Scopus

2-s2.0-85103297607