NOISE AND STEP HEIGHT PERFORMANCE OF SELECTED OPTICAL SURFACE MEASURING INSTRUMENTS

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26210%2F17%3APU125997" target="_blank" >RIV/00216305:26210/17:PU125997 - isvavai.cz</a>

Výsledek na webu

<a href="http://doi.org./10.17973/MMSJ.2017_12_201727" target="_blank" >http://doi.org./10.17973/MMSJ.2017_12_201727</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.17973/MMSJ.2017_12_201781" target="_blank" >10.17973/MMSJ.2017_12_201781</a>

Jazyk výsledku

angličtina

Název v původním jazyce

NOISE AND STEP HEIGHT PERFORMANCE OF SELECTED OPTICAL SURFACE MEASURING INSTRUMENTS

Popis výsledku v původním jazyce

Increasing demands for manufacturing quality and new standards in surface metrology foreshadow a widespread adoption of 3D surface topography measurement in manufacturing quality control. This raises the question of instrument selection. Coherence scanning interferometry and laser scanning confocal microscopy are some of the most common technologies in optical measurement of surface topography. These methods differ significantly in their suitability for different types of measurement. This article provides a comparison of the measurement noise and step height measurement performance two measuring instruments based on these two principles in relation to objectives used for measurement. Such data can be used to inform instrument selection in an industrial environment.

Název v anglickém jazyce

NOISE AND STEP HEIGHT PERFORMANCE OF SELECTED OPTICAL SURFACE MEASURING INSTRUMENTS

Popis výsledku anglicky

Increasing demands for manufacturing quality and new standards in surface metrology foreshadow a widespread adoption of 3D surface topography measurement in manufacturing quality control. This raises the question of instrument selection. Coherence scanning interferometry and laser scanning confocal microscopy are some of the most common technologies in optical measurement of surface topography. These methods differ significantly in their suitability for different types of measurement. This article provides a comparison of the measurement noise and step height measurement performance two measuring instruments based on these two principles in relation to objectives used for measurement. Such data can be used to inform instrument selection in an industrial environment.

Druh

J_SC - Článek v periodiku v databázi SCOPUS

CEP obor

—

OECD FORD obor

20306 - Audio engineering, reliability analysis

Projekt

—

Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2017

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

MM Science Journal

ISSN

1803-1269

e-ISSN

1805-0476

Svazek periodika

2017

Číslo periodika v rámci svazku

5

Stát vydavatele periodika

CZ - Česká republika

Počet stran výsledku

5

Strana od-do

2030-2034

Kód UT WoS článku

—

EID výsledku v databázi Scopus

2-s2.0-85038125046