Uhlíkové nanotrubice - výroba metodou PECVD.

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F05%3APU54542" target="_blank" >RIV/00216305:26220/05:PU54542 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Carbon nanotubes - manufacturing by plasma enhanced CVD.

Popis výsledku v původním jazyce

The microwave (mw) plasma torch at atmospheric pressure has been studied for carbon nanotubes (CNT) synthesis. The depositions were carried out on silicon substrates with 5-15 nm thin iron catalytic overlayers from the mixture of argon, hydrogen and methane. The optical emission spectroscopy of the torch showed the presence of C2 and CH radicals as well as carbon and hydrogen excited atoms. The vicinity of the substrate influenced the relative intensities and increased the emission of C2. For fixed mw ppower, the temperature of the substrate strongly depended on its position with respect to the nozzle electrode and on the gas mixture, particularly the amount of H2. The speed of the substrate heating during an early deposition phase had a significant effect on the CNT synthesis. An abrupt increase of the temperature at the beginning increased the efficiency of the CNT synthesis. Areas of dense straight standing CNTs, 30 nm in average diameter, with approximately the same sized iron nano

Název v anglickém jazyce

Carbon nanotubes - manufacturing by plasma enhanced CVD.

Popis výsledku anglicky

The microwave (mw) plasma torch at atmospheric pressure has been studied for carbon nanotubes (CNT) synthesis. The depositions were carried out on silicon substrates with 5-15 nm thin iron catalytic overlayers from the mixture of argon, hydrogen and methane. The optical emission spectroscopy of the torch showed the presence of C2 and CH radicals as well as carbon and hydrogen excited atoms. The vicinity of the substrate influenced the relative intensities and increased the emission of C2. For fixed mw ppower, the temperature of the substrate strongly depended on its position with respect to the nozzle electrode and on the gas mixture, particularly the amount of H2. The speed of the substrate heating during an early deposition phase had a significant effect on the CNT synthesis. An abrupt increase of the temperature at the beginning increased the efficiency of the CNT synthesis. Areas of dense straight standing CNTs, 30 nm in average diameter, with approximately the same sized iron nano

Druh

D - Stať ve sborníku

CEP obor

JA - Elektronika a optoelektronika, elektrotechnika

OECD FORD obor

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Projekt

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Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2005

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Intensive Training Programme in Electronic System Design

ISBN

80-214-3042-7

ISSN

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e-ISSN

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Počet stran výsledku

3

Strana od-do

155-157

Název nakladatele

Technological Institute of Chania

Místo vydání

Chania

Místo konání akce

Chania, Crete, Greece

Datum konání akce

21. 9. 2005

Typ akce podle státní příslušnosti

CST - Celostátní akce

Kód UT WoS článku

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