The formation of Self-organized 3-d Arrays of Semiconductor Metal-oxide Nanocolumns for Advanced Sensor Applications

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F13%3APU104573" target="_blank" >RIV/00216305:26220/13:PU104573 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

The formation of Self-organized 3-d Arrays of Semiconductor Metal-oxide Nanocolumns for Advanced Sensor Applications

Popis výsledku v původním jazyce

In this work electrochemical anodizing has been employed to synthesize, for the first time, a three-dimensional nanostructured column-like metal-oxide semiconductor film in which a change in the conductivity along the columns, assembled between the two parallel metal electrodes, is the controlling factor during chemisorption reactions when a gas penetrates such a film. To demonstrate the technology capability, several types of unique niobium-oxide-nanocolumn arrays have been synthesized via multistep anodic processing of an Al/Nb thin-film bilayer sputter-deposited onto oxidized Si substrates and additionally tailoring their parameters by combining chemical dissolution and high-temperature annealing. The films formation-structure-property relationship has been studied in pursuit of altering the film properties and discovering new functionalities for potential application to advanced micro and nanosensors

Název v anglickém jazyce

The formation of Self-organized 3-d Arrays of Semiconductor Metal-oxide Nanocolumns for Advanced Sensor Applications

Popis výsledku anglicky

In this work electrochemical anodizing has been employed to synthesize, for the first time, a three-dimensional nanostructured column-like metal-oxide semiconductor film in which a change in the conductivity along the columns, assembled between the two parallel metal electrodes, is the controlling factor during chemisorption reactions when a gas penetrates such a film. To demonstrate the technology capability, several types of unique niobium-oxide-nanocolumn arrays have been synthesized via multistep anodic processing of an Al/Nb thin-film bilayer sputter-deposited onto oxidized Si substrates and additionally tailoring their parameters by combining chemical dissolution and high-temperature annealing. The films formation-structure-property relationship has been studied in pursuit of altering the film properties and discovering new functionalities for potential application to advanced micro and nanosensors

Druh

O - Ostatní výsledky

CEP obor

JA - Elektronika a optoelektronika, elektrotechnika

OECD FORD obor

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Projekt

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Návaznosti

R - Projekt Ramcoveho programu EK

Rok uplatnění

2013

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů