Carbon Nanotube Emitters in Sensoric Application

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F13%3APU105778" target="_blank" >RIV/00216305:26220/13:PU105778 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Carbon Nanotube Emitters in Sensoric Application

Popis výsledku v původním jazyce

A contemporary approach to study the emission properties of carbon nanotubes (CNTs) in low distances between two electrodes is described in this paper. The method could be used in modern MEMS pressure sensor applications. The field emission works on theprinciple that the field emission current is correlated with the electrical field intensity, i.e., the anode-emitter distance when the applied voltage is fixed. This means that the CNTs array serves as the emitter source of electrons between the cathodeand the anode in the electric field. The measurement of emission current density flowing through the electrodes is carried out in a vacuum chamber pumped by a turbomolecular pump. The vacuum chamber is equipped with a linear nano-motion drive SmarAct that enables precise changes of the distance between two electrodes inside the vacuum chamber (step width from 50 nm to 1000 nm, sub-nanometer resolution). For this experiment, CNTs are deposited using a thermal chemical vapour deposition.

Název v anglickém jazyce

Carbon Nanotube Emitters in Sensoric Application

Popis výsledku anglicky

A contemporary approach to study the emission properties of carbon nanotubes (CNTs) in low distances between two electrodes is described in this paper. The method could be used in modern MEMS pressure sensor applications. The field emission works on theprinciple that the field emission current is correlated with the electrical field intensity, i.e., the anode-emitter distance when the applied voltage is fixed. This means that the CNTs array serves as the emitter source of electrons between the cathodeand the anode in the electric field. The measurement of emission current density flowing through the electrodes is carried out in a vacuum chamber pumped by a turbomolecular pump. The vacuum chamber is equipped with a linear nano-motion drive SmarAct that enables precise changes of the distance between two electrodes inside the vacuum chamber (step width from 50 nm to 1000 nm, sub-nanometer resolution). For this experiment, CNTs are deposited using a thermal chemical vapour deposition.

Druh

O - Ostatní výsledky

CEP obor

JA - Elektronika a optoelektronika, elektrotechnika

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2013

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů