Aerosol assisted chemical vapour deposition of surface-modified tungsten oxide nanostructures: processing and application

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F14%3APU111478" target="_blank" >RIV/00216305:26220/14:PU111478 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Aerosol assisted chemical vapour deposition of surface-modified tungsten oxide nanostructures: processing and application

Popis výsledku v původním jazyce

In this work, we used AACVD to synthesize non-modified and modified tungsten oxide NSs, demonstrating that synthesis, functionalization and integration of these structures into microsystem can take place in a single processing step. These NSs were integrated in a single-step deposition via vapour solid mechanism, without the use of pre-grown catalysts, with either MEMS- or polymer-based devices, showing the compatibility of AACVD with microelectronics manufacturing processes. The microsensors fabricatedusing this method were validated towards various gaseous species, including hydrogen, ethanol and carbon monoxide, showing satisfactory responses. The sensors based on modified tungsten oxide NSs revealed enhanced properties compared to intrinsic tungsten oxide NSs, particularly platinum NPs modified tungsten oxide show better performance to hydrogen. In addition, tungsten oxide NSs, grown on polymeric- and MEMS-based sensor platforms, revealed comparable sensor behavior, with similar r

Název v anglickém jazyce

Aerosol assisted chemical vapour deposition of surface-modified tungsten oxide nanostructures: processing and application

Popis výsledku anglicky

In this work, we used AACVD to synthesize non-modified and modified tungsten oxide NSs, demonstrating that synthesis, functionalization and integration of these structures into microsystem can take place in a single processing step. These NSs were integrated in a single-step deposition via vapour solid mechanism, without the use of pre-grown catalysts, with either MEMS- or polymer-based devices, showing the compatibility of AACVD with microelectronics manufacturing processes. The microsensors fabricatedusing this method were validated towards various gaseous species, including hydrogen, ethanol and carbon monoxide, showing satisfactory responses. The sensors based on modified tungsten oxide NSs revealed enhanced properties compared to intrinsic tungsten oxide NSs, particularly platinum NPs modified tungsten oxide show better performance to hydrogen. In addition, tungsten oxide NSs, grown on polymeric- and MEMS-based sensor platforms, revealed comparable sensor behavior, with similar r

Druh

O - Ostatní výsledky

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

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Návaznosti

V - Vyzkumna aktivita podporovana z jinych verejnych zdroju

Rok uplatnění

2014

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů