Temperature and Sensitivity Analysis on MEMS Vibration Sensors with Different Principles of Operation

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F15%3APU115099" target="_blank" >RIV/00216305:26220/15:PU115099 - isvavai.cz</a>

Výsledek na webu

<a href="http://icsv22.org/" target="_blank" >http://icsv22.org/</a>

DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Temperature and Sensitivity Analysis on MEMS Vibration Sensors with Different Principles of Operation

Popis výsledku v původním jazyce

This article describes the experimental research on qualitative parameter validation of MEMS-based vibration sensors. The aim of the paper is to compare three MEMS vibration sensors with different principles of operation; the investigated samples represent major principles used in currently available MEMS accelerometers, namely the capacitive (STMicroelectronics LIS3L06AL), thermal (MEMSIC MXA6500M), and piezoresistive (Panasonic AGS61331) approaches. The actual comparison of the examined objects was performed using primary and secondary methods for the calibration of vibration sensors. In the first experiment, we measured the sensitivity and frequency characteristics within the operating range of the accelerometers, applying the primary methods to compare the investigated MEMS objects. At the following stage, the results yielded from the monitoring of temperature effects and their analysis based on the secondary calibration methods were utilized to verify the sensitivity and temperature dependences of the MEMS accelerometers. Within the paper, the measured characteristics are compared to the related catalog datasheets, and the possibilities of suppressing the temperature effects are discussed to finalize the overall presentation of the problem.

Název v anglickém jazyce

Temperature and Sensitivity Analysis on MEMS Vibration Sensors with Different Principles of Operation

Popis výsledku anglicky

This article describes the experimental research on qualitative parameter validation of MEMS-based vibration sensors. The aim of the paper is to compare three MEMS vibration sensors with different principles of operation; the investigated samples represent major principles used in currently available MEMS accelerometers, namely the capacitive (STMicroelectronics LIS3L06AL), thermal (MEMSIC MXA6500M), and piezoresistive (Panasonic AGS61331) approaches. The actual comparison of the examined objects was performed using primary and secondary methods for the calibration of vibration sensors. In the first experiment, we measured the sensitivity and frequency characteristics within the operating range of the accelerometers, applying the primary methods to compare the investigated MEMS objects. At the following stage, the results yielded from the monitoring of temperature effects and their analysis based on the secondary calibration methods were utilized to verify the sensitivity and temperature dependences of the MEMS accelerometers. Within the paper, the measured characteristics are compared to the related catalog datasheets, and the possibilities of suppressing the temperature effects are discussed to finalize the overall presentation of the problem.

Druh

D - Stať ve sborníku

CEP obor

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OECD FORD obor

20201 - Electrical and electronic engineering

Projekt

<a href="/cs/project/LO1210" target="_blank" >LO1210: Energie v podmínkách udržitelného rozvoje (EN-PUR)</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2015

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Proceedings of the 22nd International Congress on Sound and Vibration

ISBN

978-88-88942-48-3

ISSN

2329-3675

e-ISSN

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Počet stran výsledku

8

Strana od-do

1-8

Název nakladatele

International Institute of Acoustic and Vibration

Místo vydání

Florencie, Itálie

Místo konání akce

Florencie

Datum konání akce

12. 7. 2015

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

000398997006083