Optical pressure sensors in LTCC technology

Kód výsledku v IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F15%3APU116599" target="_blank" >RIV/00216305:26220/15:PU116599 - isvavai.cz</a>
Výsledek na webu
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Jazyk výsledku
angličtina
Název v původním jazyce
Optical pressure sensors in LTCC technology
Popis výsledku v původním jazyce
This paper deals with the design and measurement of optical pressure sensors developed in LTCC technology. The sensor design was made for two working principles used in optical sensing. Using interferometry measurement of the distance using Fabry-Pérot resonator and diffraction structure of Fiber Bragg Grating. In both cases there was used ceramic structure with membrane used as a pressure transducer. In the first test both methods seems to be useable in pressure sensing of pressures close to the atmospheric pressure. There are still some manufacturing and design challenges, which are needed to overcome.
Název v anglickém jazyce
Optical pressure sensors in LTCC technology
Popis výsledku anglicky
This paper deals with the design and measurement of optical pressure sensors developed in LTCC technology. The sensor design was made for two working principles used in optical sensing. Using interferometry measurement of the distance using Fabry-Pérot resonator and diffraction structure of Fiber Bragg Grating. In both cases there was used ceramic structure with membrane used as a pressure transducer. In the first test both methods seems to be useable in pressure sensing of pressures close to the atmospheric pressure. There are still some manufacturing and design challenges, which are needed to overcome.

Rok uplatnění
2015
Kód důvěrnosti údajů
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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