Optical pressure sensors for harsh environment

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F18%3APU130207" target="_blank" >RIV/00216305:26220/18:PU130207 - isvavai.cz</a>

Výsledek na webu

<a href="https://ieeexplore.ieee.org/document/8346868" target="_blank" >https://ieeexplore.ieee.org/document/8346868</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.23919/EMPC.2017.8346868" target="_blank" >10.23919/EMPC.2017.8346868</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Optical pressure sensors for harsh environment

Popis výsledku v původním jazyce

This paper deals with the design, manufacturing, and evaluation of a new optical pressure sensor produced by using Low Temperature Co-fired Ceramic technology. This optical sensor is designed for the applications with harsh operating conditions. The sensor has to withstand temperatures up to 300 °C and work in chemically aggressive environment. The paper gives a brief overview of the benefits and problems related to the optical measurement methods suitable for pressure sensor interrogation. Optical spectrum change based measurement method was chosen for the best sensor performance. Pressure transducer presented in this paper is based on the interrogation of the light spectra reflected from the Fabry-Pérot optical cavity. The sensors were designed for various pressure ranges, samples were manufactured, measured and tested. A selected optical method for enhancing the temperature compensation and measurement accuracy is discussed.

Název v anglickém jazyce

Optical pressure sensors for harsh environment

Popis výsledku anglicky

This paper deals with the design, manufacturing, and evaluation of a new optical pressure sensor produced by using Low Temperature Co-fired Ceramic technology. This optical sensor is designed for the applications with harsh operating conditions. The sensor has to withstand temperatures up to 300 °C and work in chemically aggressive environment. The paper gives a brief overview of the benefits and problems related to the optical measurement methods suitable for pressure sensor interrogation. Optical spectrum change based measurement method was chosen for the best sensor performance. Pressure transducer presented in this paper is based on the interrogation of the light spectra reflected from the Fabry-Pérot optical cavity. The sensors were designed for various pressure ranges, samples were manufactured, measured and tested. A selected optical method for enhancing the temperature compensation and measurement accuracy is discussed.

Druh

D - Stať ve sborníku

CEP obor

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OECD FORD obor

20504 - Ceramics

Projekt

—

Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2018

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Microelectronics and Packaging Conference (EMPC) & Exhibition, 2017 21st European

ISBN

978-0-9568086-4-6

ISSN

—

e-ISSN

—

Počet stran výsledku

5

Strana od-do

1-5

Název nakladatele

Neuveden

Místo vydání

Neuveden

Místo konání akce

Warsaw, Polsko

Datum konání akce

10. 9. 2017

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

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