Slip flow analysis in an experimental chamber simulating dif-ferential pumping in the Environmental Scanning Electron Microscope

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F22%3APU146101" target="_blank" >RIV/00216305:26220/22:PU146101 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.mdpi.com/1424-8220/22/23/9033" target="_blank" >https://www.mdpi.com/1424-8220/22/23/9033</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.3390/s22239033" target="_blank" >10.3390/s22239033</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Slip flow analysis in an experimental chamber simulating dif-ferential pumping in the Environmental Scanning Electron Microscope

Popis výsledku v původním jazyce

The paper describes the combination of experimental measurements with mathemati-cal-physics analysis during the investigation of the flow in the aperture at low pressures in a prepared experimental chamber. In the first step, experimental measurements of the pressure in the specimen chamber and at its outlet were performed during the pumping of this chamber from atmospheric pressure to the operating pressure typical for the current AQUASEM II environmental electron microscope at the ISI of the CAS in Brno. Based on these results, a mathematical-physics model was tuned in Ansys Fluent system and sub-sequently used for mathematical-physics analysis in the Slip Flow regime on the nozzle wall at low pressure. These analyzes will be used to fine-tune the experimental chamber and, once the chamber is operational, it will be possible to compare the results obtained from experimental measurements of nozzle wall pressure, static and total pressure, and temperature from the nozzle axis region in supersonic flow with the results obtained from the mathematical-physics analyses. Based on the above comparative analyses, we will be able to determine the realistic Slip Flow at the nozzle wall under different conditions at the continuum mechanics boundary.

Název v anglickém jazyce

Slip flow analysis in an experimental chamber simulating dif-ferential pumping in the Environmental Scanning Electron Microscope

Popis výsledku anglicky

The paper describes the combination of experimental measurements with mathemati-cal-physics analysis during the investigation of the flow in the aperture at low pressures in a prepared experimental chamber. In the first step, experimental measurements of the pressure in the specimen chamber and at its outlet were performed during the pumping of this chamber from atmospheric pressure to the operating pressure typical for the current AQUASEM II environmental electron microscope at the ISI of the CAS in Brno. Based on these results, a mathematical-physics model was tuned in Ansys Fluent system and sub-sequently used for mathematical-physics analysis in the Slip Flow regime on the nozzle wall at low pressure. These analyzes will be used to fine-tune the experimental chamber and, once the chamber is operational, it will be possible to compare the results obtained from experimental measurements of nozzle wall pressure, static and total pressure, and temperature from the nozzle axis region in supersonic flow with the results obtained from the mathematical-physics analyses. Based on the above comparative analyses, we will be able to determine the realistic Slip Flow at the nozzle wall under different conditions at the continuum mechanics boundary.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20201 - Electrical and electronic engineering

Projekt

—

Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2022

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

SENSORS

ISSN

1424-8220

e-ISSN

1424-3210

Svazek periodika

22

Číslo periodika v rámci svazku

23

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

24

Strana od-do

1-24

Kód UT WoS článku

000896228100001

EID výsledku v databázi Scopus

2-s2.0-85143788806