Design and Fabrication of Birdcage Resonators for Low-pressure Plasma Excitation

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F22%3APU147069" target="_blank" >RIV/00216305:26220/22:PU147069 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.radioeng.cz/fulltexts/2023/23_01_0044_0050.pdf" target="_blank" >https://www.radioeng.cz/fulltexts/2023/23_01_0044_0050.pdf</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.13164/re.2023.0044" target="_blank" >10.13164/re.2023.0044</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Design and Fabrication of Birdcage Resonators for Low-pressure Plasma Excitation

Popis výsledku v původním jazyce

This paper presents a design, analysis and optimization of birdcage resonators employed in a novel radiofrequency plasma source. Three resonators were simulated and fabricated. The resonators differ in their design and in the different materials of used dielectric - polyimide and polytetrafluorethylene (PTFE). The resonance frequency of fabricated samples possesses a maximal error of 2.2% compared to the simulated values. The performance in plasma excitation is related to the electrical parameters, while the best performing resonator (PTFE-based) exhibits the maximum real impedance of 644.3 ohm at the resonance frequency and the 799.5 V/m electric field strength. This resonator shows the best power efficiency in a plasma ignition experiment. The resonator ignited the discharge at ca. 1 Pa of ambient air atmosphere with only 0.34 W of input radiofrequency power.

Název v anglickém jazyce

Design and Fabrication of Birdcage Resonators for Low-pressure Plasma Excitation

Popis výsledku anglicky

This paper presents a design, analysis and optimization of birdcage resonators employed in a novel radiofrequency plasma source. Three resonators were simulated and fabricated. The resonators differ in their design and in the different materials of used dielectric - polyimide and polytetrafluorethylene (PTFE). The resonance frequency of fabricated samples possesses a maximal error of 2.2% compared to the simulated values. The performance in plasma excitation is related to the electrical parameters, while the best performing resonator (PTFE-based) exhibits the maximum real impedance of 644.3 ohm at the resonance frequency and the 799.5 V/m electric field strength. This resonator shows the best power efficiency in a plasma ignition experiment. The resonator ignited the discharge at ca. 1 Pa of ambient air atmosphere with only 0.34 W of input radiofrequency power.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20200 - Electrical engineering, Electronic engineering, Information engineering

Projekt

<a href="/cs/project/EF19_073%2F0016948" target="_blank" >EF19_073/0016948: Kvalitní interní granty VUT</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2022

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Radioengineering

ISSN

1210-2512

e-ISSN

—

Svazek periodika

32

Číslo periodika v rámci svazku

1

Stát vydavatele periodika

CZ - Česká republika

Počet stran výsledku

7

Strana od-do

44-50

Kód UT WoS článku

001120200100005

EID výsledku v databázi Scopus

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