Tin Dioxide ? Multiwalled Carbon Nanotubes Based Gas Sensor for Isobutane Detection

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F14%3APU113946" target="_blank" >RIV/00216305:26620/14:PU113946 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Tin Dioxide ? Multiwalled Carbon Nanotubes Based Gas Sensor for Isobutane Detection

Popis výsledku v původním jazyce

The aim of this work is design, fabrication and characterization of semiconductive gas sensor with active layer based on tin dioxide and multiwalled carbon nanotubes for isobutene detection. Combination of LTCC technology and thick-film technology was chosen for sensor fabrication due to the need of high operating temperature. These technologies allow the sensor to be heated up to 500 °C. Gold/titanium interdigitated electrodes on silicon substrate were chosen to achieve higher sensitivity. Titanium layer has high temperature resistance and provides very good adhesion to silicon substrate and top gold layer that improves conductivity of these finger electrodes. Several important parameters of active layer influencing sensor properties were investigated. Influence of suitable volume of multiwalled carbon nanotubes in tin dioxide active layer, active layer thickness and operating temperature to sensing properties were studied. It was found that the active layer with the largest amount of

Název v anglickém jazyce

Tin Dioxide ? Multiwalled Carbon Nanotubes Based Gas Sensor for Isobutane Detection

Popis výsledku anglicky

The aim of this work is design, fabrication and characterization of semiconductive gas sensor with active layer based on tin dioxide and multiwalled carbon nanotubes for isobutene detection. Combination of LTCC technology and thick-film technology was chosen for sensor fabrication due to the need of high operating temperature. These technologies allow the sensor to be heated up to 500 °C. Gold/titanium interdigitated electrodes on silicon substrate were chosen to achieve higher sensitivity. Titanium layer has high temperature resistance and provides very good adhesion to silicon substrate and top gold layer that improves conductivity of these finger electrodes. Several important parameters of active layer influencing sensor properties were investigated. Influence of suitable volume of multiwalled carbon nanotubes in tin dioxide active layer, active layer thickness and operating temperature to sensing properties were studied. It was found that the active layer with the largest amount of

Druh

O - Ostatní výsledky

CEP obor

JB - Senzory, čidla, měření a regulace

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2014

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů