Atomic layer deposition of titanium dioxide on multi-walled carbon nanotubes for ammonia gas sensing

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F19%3APU134866" target="_blank" >RIV/00216305:26620/19:PU134866 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/00216224:14310/19:00109858

Výsledek na webu

<a href="https://www.sciencedirect.com/science/article/pii/S0257897219303962?via%3Dihub" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0257897219303962?via%3Dihub</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2019.04.031" target="_blank" >10.1016/j.surfcoat.2019.04.031</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Atomic layer deposition of titanium dioxide on multi-walled carbon nanotubes for ammonia gas sensing

Popis výsledku v původním jazyce

Carbon nanotube (CNTs)-metal oxide semiconductor (MOS) hybrid nanostructures can provide a new pathway for room temperature chemiresistive gas sensors due to combined properties of both the materials and the creation of heterojunctions between CNTs and MOS. Multi-walled carbon nanotubes (MWCNTs) were grown on Si substrates coated with SiO2 layer by catalytic chemical vapor deposition (CCVD) and coated by TiO2 films of different nominal thicknesses, 5, 10 and 20 nm, using atomic layer deposition (ALD). ALD is a self-limiting surface process providing highly uniform and conformal coatings if reactive sites exist on the surface. The CNT surface is quite inert and therefore, a modification of MWCNTs by carboxyl plasma polymer (PP) film was applied prior to ALD of TiO2. The carboxyl PPs improved film uniformity, even though the thinnest TiO2 film still formed an island-like structure. Raman spectroscopy revealed that coating by TiO2 or carboxyl PP increased structural disorder of sp(2) carbon in the MWCNTs and the thinnest TiO2 coatings induced the lowest disorder. The thinnest coatings also resulted in the highest sensor response to NH3. Nevertheless, for all thicknesses the sensors coated with carboxyl PP/TiO2 double layer showed higher response as compared to the pristine CNTs and those without the carboxyl PP film.

Název v anglickém jazyce

Atomic layer deposition of titanium dioxide on multi-walled carbon nanotubes for ammonia gas sensing

Popis výsledku anglicky

Carbon nanotube (CNTs)-metal oxide semiconductor (MOS) hybrid nanostructures can provide a new pathway for room temperature chemiresistive gas sensors due to combined properties of both the materials and the creation of heterojunctions between CNTs and MOS. Multi-walled carbon nanotubes (MWCNTs) were grown on Si substrates coated with SiO2 layer by catalytic chemical vapor deposition (CCVD) and coated by TiO2 films of different nominal thicknesses, 5, 10 and 20 nm, using atomic layer deposition (ALD). ALD is a self-limiting surface process providing highly uniform and conformal coatings if reactive sites exist on the surface. The CNT surface is quite inert and therefore, a modification of MWCNTs by carboxyl plasma polymer (PP) film was applied prior to ALD of TiO2. The carboxyl PPs improved film uniformity, even though the thinnest TiO2 film still formed an island-like structure. Raman spectroscopy revealed that coating by TiO2 or carboxyl PP increased structural disorder of sp(2) carbon in the MWCNTs and the thinnest TiO2 coatings induced the lowest disorder. The thinnest coatings also resulted in the highest sensor response to NH3. Nevertheless, for all thicknesses the sensors coated with carboxyl PP/TiO2 double layer showed higher response as compared to the pristine CNTs and those without the carboxyl PP film.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20501 - Materials engineering

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2019

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

—

Svazek periodika

370

Číslo periodika v rámci svazku

370

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

9

Strana od-do

235-243

Kód UT WoS článku

000471083100024

EID výsledku v databázi Scopus

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