A Sub-nL Chip Calorimeter and Its Application to the Measurement of the Photothermal Transduction Efficiency of Plasmonic Nanoparticles

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F21%3APU141845" target="_blank" >RIV/00216305:26620/21:PU141845 - isvavai.cz</a>

Výsledek na webu

<a href="https://ieeexplore.ieee.org/document/9494100" target="_blank" >https://ieeexplore.ieee.org/document/9494100</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1109/JMEMS.2021.3096524" target="_blank" >10.1109/JMEMS.2021.3096524</a>

Jazyk výsledku

angličtina

Název v původním jazyce

A Sub-nL Chip Calorimeter and Its Application to the Measurement of the Photothermal Transduction Efficiency of Plasmonic Nanoparticles

Popis výsledku v původním jazyce

Here, we introduce a microchip for differential measurements of aqueous samples in twin calorimetric arms with a sub-nL enclosed space. Each arm features a fluidic microchannel located in close proximity to a thin-film resistance thermometer and heater patterned on a low-stress SiN membrane held over a Si cavity with suspension beams. The chip exhibits a rapid response with a thermal time constant of less than 10 ms in atmosphere and a residual thermal conductance below 6 mu W.K-1, one of the lowest reported and accounts for the excellent sensitivity registered in vacuum up to 11 V.W-1. These values are in good agreement with those ones predicted by modeling using finite element method, lumped-capacitance analysis, and calorimeter electrothermal circuit simulation together with the measurement system. Long suspension beams in each arm ensure uniform temperature maintained across its membrane as revealed by the fluorescence-based melting curve analysis. We share the specific heat capacity values of water, glycerin, and mineral oil accurately measured by the chip. Lastly, we demonstrate the chip calorimeter utility on the measurement of the photothermal transduction efficiency of plasmonic nanoparticles, which makes our study further unique in expanding the applications of chip calorimeters.

Název v anglickém jazyce

A Sub-nL Chip Calorimeter and Its Application to the Measurement of the Photothermal Transduction Efficiency of Plasmonic Nanoparticles

Popis výsledku anglicky

Here, we introduce a microchip for differential measurements of aqueous samples in twin calorimetric arms with a sub-nL enclosed space. Each arm features a fluidic microchannel located in close proximity to a thin-film resistance thermometer and heater patterned on a low-stress SiN membrane held over a Si cavity with suspension beams. The chip exhibits a rapid response with a thermal time constant of less than 10 ms in atmosphere and a residual thermal conductance below 6 mu W.K-1, one of the lowest reported and accounts for the excellent sensitivity registered in vacuum up to 11 V.W-1. These values are in good agreement with those ones predicted by modeling using finite element method, lumped-capacitance analysis, and calorimeter electrothermal circuit simulation together with the measurement system. Long suspension beams in each arm ensure uniform temperature maintained across its membrane as revealed by the fluorescence-based melting curve analysis. We share the specific heat capacity values of water, glycerin, and mineral oil accurately measured by the chip. Lastly, we demonstrate the chip calorimeter utility on the measurement of the photothermal transduction efficiency of plasmonic nanoparticles, which makes our study further unique in expanding the applications of chip calorimeters.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20201 - Electrical and electronic engineering

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2021

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

ISSN

1057-7157

e-ISSN

1941-0158

Svazek periodika

30

Číslo periodika v rámci svazku

5

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

11

Strana od-do

759-769

Kód UT WoS článku

000697819700015

EID výsledku v databázi Scopus

2-s2.0-85112664993