The Growth, Composition, and Functional Properties of Self-Organized Nanostructured ZrO2-Al2O3 Anodic Films for Advanced Dielectric Applications

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F21%3APU142204" target="_blank" >RIV/00216305:26620/21:PU142204 - isvavai.cz</a>

Výsledek na webu

<a href="https://onlinelibrary.wiley.com/doi/10.1002/aelm.202100505" target="_blank" >https://onlinelibrary.wiley.com/doi/10.1002/aelm.202100505</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1002/aelm.202100505" target="_blank" >10.1002/aelm.202100505</a>

Jazyk výsledku

angličtina

Název v původním jazyce

The Growth, Composition, and Functional Properties of Self-Organized Nanostructured ZrO2-Al2O3 Anodic Films for Advanced Dielectric Applications

Popis výsledku v původním jazyce

An aluminum-on-zirconium bilayer is anodized in oxalic acid solution to transform the Al layer into porous anodic alumina (PAA); this is followed by the PAA-assisted re-anodizing of the Zr underlayer at voltages 40-280 V. The process results in an array of amorphous ZrO2 nanocolumns, 45-330 nm long, partly filling the PAA pores and anchored to a continuous bottom oxide layer under the pores, 20-130 nm thick, comprising a ZrO1.8 spongelike sublayer superimposed on a ZrO1.5 compact sublayer. The thicknesses of the nanostructured and bottom oxides increase linearly with re-anodizing voltage, disclosing a low film formation ratio of 1.65 nm V-1, which is impossible with anodic ZrO2. The amorphous ZrO2 nanocolumns embedded in the highly resistive amorphous PAA matrix combined with the laminated bottom oxide reveal a nearly ideal dielectric performance in a wide frequency range (10(-4)-10(4) Hz) complemented by the low leakage currents and high breakdown voltages (up to 280 V). The film permittivity may be tuned, from 11 to 20, by combining the anodizing and pore-widening techniques. The advantageous architecture, fabrication approach, and functional properties of the films allow the design of a prototype of an emerging hybrid polymer electrolytic microcapacitor for on-chip integration.

Název v anglickém jazyce

The Growth, Composition, and Functional Properties of Self-Organized Nanostructured ZrO2-Al2O3 Anodic Films for Advanced Dielectric Applications

Popis výsledku anglicky

An aluminum-on-zirconium bilayer is anodized in oxalic acid solution to transform the Al layer into porous anodic alumina (PAA); this is followed by the PAA-assisted re-anodizing of the Zr underlayer at voltages 40-280 V. The process results in an array of amorphous ZrO2 nanocolumns, 45-330 nm long, partly filling the PAA pores and anchored to a continuous bottom oxide layer under the pores, 20-130 nm thick, comprising a ZrO1.8 spongelike sublayer superimposed on a ZrO1.5 compact sublayer. The thicknesses of the nanostructured and bottom oxides increase linearly with re-anodizing voltage, disclosing a low film formation ratio of 1.65 nm V-1, which is impossible with anodic ZrO2. The amorphous ZrO2 nanocolumns embedded in the highly resistive amorphous PAA matrix combined with the laminated bottom oxide reveal a nearly ideal dielectric performance in a wide frequency range (10(-4)-10(4) Hz) complemented by the low leakage currents and high breakdown voltages (up to 280 V). The film permittivity may be tuned, from 11 to 20, by combining the anodizing and pore-widening techniques. The advantageous architecture, fabrication approach, and functional properties of the films allow the design of a prototype of an emerging hybrid polymer electrolytic microcapacitor for on-chip integration.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

21001 - Nano-materials (production and properties)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2021

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

MATERIALS CHEMISTRY FRONTIERS

ISSN

2052-1537

e-ISSN

—

Svazek periodika

7

Číslo periodika v rámci svazku

2100505

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

13

Strana od-do

1-13

Kód UT WoS článku

000693695000001

EID výsledku v databázi Scopus

2-s2.0-85114346909