Demystifying data evaluation in the measurement of periodic structures

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F23%3APU148299" target="_blank" >RIV/00216305:26620/23:PU148299 - isvavai.cz</a>

Výsledek na webu

<a href="https://iopscience.iop.org/article/10.1088/1361-6501/acbab3" target="_blank" >https://iopscience.iop.org/article/10.1088/1361-6501/acbab3</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/1361-6501/acbab3" target="_blank" >10.1088/1361-6501/acbab3</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Demystifying data evaluation in the measurement of periodic structures

Popis výsledku v původním jazyce

Periodic structures are often found in various areas of nanoscience and nanotechnology with many of them being used for metrological purposes either to calibrate instruments, or forming the basis of measuring devices such as encoders. Evaluating the period of one or two-dimensional periodic structures from topography measurements, e.g. performed using scanning probe microscopy, can be achieved using different methodologies with many grating evaluation methods having been proposed in the past and applied to a handful of examples. The optimum methodology for determining the grating period/pitch is not immediately obvious. This paper reports the results of extensive large-scale simulations and analysis to evaluate the performance of both direct and Fourier space data processing methods. Many thousands of simulations have been performed on a variety of different gratings under different measurement conditions and including the simulation of defects encountered in real life situations. The paper concludes with a summary of the merits and disadvantages of the methods together with practical recommendations for the measurements of periodic structures and for developing algorithms for processing them.

Název v anglickém jazyce

Demystifying data evaluation in the measurement of periodic structures

Popis výsledku anglicky

Periodic structures are often found in various areas of nanoscience and nanotechnology with many of them being used for metrological purposes either to calibrate instruments, or forming the basis of measuring devices such as encoders. Evaluating the period of one or two-dimensional periodic structures from topography measurements, e.g. performed using scanning probe microscopy, can be achieved using different methodologies with many grating evaluation methods having been proposed in the past and applied to a handful of examples. The optimum methodology for determining the grating period/pitch is not immediately obvious. This paper reports the results of extensive large-scale simulations and analysis to evaluate the performance of both direct and Fourier space data processing methods. Many thousands of simulations have been performed on a variety of different gratings under different measurement conditions and including the simulation of defects encountered in real life situations. The paper concludes with a summary of the merits and disadvantages of the methods together with practical recommendations for the measurements of periodic structures and for developing algorithms for processing them.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10700 - Other natural sciences

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2023

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Measurement Science and Technology

ISSN

0957-0233

e-ISSN

1361-6501

Svazek periodika

34

Číslo periodika v rámci svazku

5

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

21

Strana od-do

1-21

Kód UT WoS článku

000936005100001

EID výsledku v databázi Scopus

2-s2.0-85148861219