Tribological properties and the abrasion resistance thin films of chromium nitride

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F46747885%3A24210%2F16%3A00000122" target="_blank" >RIV/46747885:24210/16:00000122 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/46747885:24620/16:00000122

Výsledek na webu

<a href="https://www.scientific.net/DDF.368.73" target="_blank" >https://www.scientific.net/DDF.368.73</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.4028/www.scientific.net/DDF.368.73" target="_blank" >10.4028/www.scientific.net/DDF.368.73</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Tribological properties and the abrasion resistance thin films of chromium nitride

Popis výsledku v původním jazyce

Chrome nitride (CrN) and CrN/Cr thin films were grown on EN ISO HS6-5-2 tool steel, which has been used as a substrate material. It is a high-speed Mo-W steel with high toughness. Chrome nitride thin films were deposited using a RF PA CVD/Magnetron Sputtering (MS) system at a gas flow ratio of 15/13 sccm of Ar/N2. During the deposition process the pressure in the vacuum chamber was 0.9 Pa, the deposition Ubias and deposition time were different. The parameters of the process influence properties of the thin films were microstructure, hardness and adhesion to the substrate, etc. Optimal selection of process parameters is needed to achieve particular property combinations. The basis of the tribological measurements is the "ball-on-disc" testing method. Tribological testing (EN1071-13:2010) was conducted using a ball made from Si3N4 with a diameter of 6.350 mm, with a constant load of 3N at room temperature and humidity of 40±2 %. A Zeiss AXIO Imager M2 light optical microscope and a Dektak XT ™ mechanical profilometer were used to evaluate the wear of the friction pairs at a load of 6mg and the size of the measured area of 200x1000 µm

Název v anglickém jazyce

Tribological properties and the abrasion resistance thin films of chromium nitride

Popis výsledku anglicky

Chrome nitride (CrN) and CrN/Cr thin films were grown on EN ISO HS6-5-2 tool steel, which has been used as a substrate material. It is a high-speed Mo-W steel with high toughness. Chrome nitride thin films were deposited using a RF PA CVD/Magnetron Sputtering (MS) system at a gas flow ratio of 15/13 sccm of Ar/N2. During the deposition process the pressure in the vacuum chamber was 0.9 Pa, the deposition Ubias and deposition time were different. The parameters of the process influence properties of the thin films were microstructure, hardness and adhesion to the substrate, etc. Optimal selection of process parameters is needed to achieve particular property combinations. The basis of the tribological measurements is the "ball-on-disc" testing method. Tribological testing (EN1071-13:2010) was conducted using a ball made from Si3N4 with a diameter of 6.350 mm, with a constant load of 3N at room temperature and humidity of 40±2 %. A Zeiss AXIO Imager M2 light optical microscope and a Dektak XT ™ mechanical profilometer were used to evaluate the wear of the friction pairs at a load of 6mg and the size of the measured area of 200x1000 µm

Druh

D - Stať ve sborníku

CEP obor

JK - Koroze a povrchové úpravy materiálu

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2016

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Defect and Diffusion Forum

ISBN

978-303835720-9

ISSN

1012-0386

e-ISSN

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Počet stran výsledku

4

Strana od-do

73-76

Název nakladatele

Trans Tech Publications Inc.

Místo vydání

Churerstrasse 20, CH-8808 Pfaffikon, Switzerland

Místo konání akce

Liberec

Datum konání akce

1. 1. 2015

Typ akce podle státní příslušnosti

EUR - Evropská akce

Kód UT WoS článku

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