Surface form characterization of plane-parallel elements using frequency-tuned phase-shifting interferometry

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F46747885%3A24220%2F20%3A00008053" target="_blank" >RIV/46747885:24220/20:00008053 - isvavai.cz</a>

Výsledek na webu

<a href="https://doi.org/10.1117/12.2568732" target="_blank" >https://doi.org/10.1117/12.2568732</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1117/12.2568732" target="_blank" >10.1117/12.2568732</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Surface form characterization of plane-parallel elements using frequency-tuned phase-shifting interferometry

Popis výsledku v původním jazyce

Plane-parallel optical elements, such as optical resonators, laser rods or wave plates, are widely used in many optical setups. Both planar surfaces of the element have to be manufactured with high precision in order to assure proper quality of the element and thus these surfaces have to be accurately measured. However, the interferometric measurement process, usually used for the surface form topography characterization, suffers from multiple interference patterns. This increases the total measurement error. In this paper the frequency-tuned interferometric method, that overcomes this problem, is demonstrated and compared to commonly used techniques using immersion liquid. Using a tunable laser source together with a frequency separation of the phase information from both surfaces, fringes from the first and second surface can be distinguished. Also, the interference between both surfaces can be used to obtain the wedge and thickness values of the specimen.

Název v anglickém jazyce

Surface form characterization of plane-parallel elements using frequency-tuned phase-shifting interferometry

Popis výsledku anglicky

Plane-parallel optical elements, such as optical resonators, laser rods or wave plates, are widely used in many optical setups. Both planar surfaces of the element have to be manufactured with high precision in order to assure proper quality of the element and thus these surfaces have to be accurately measured. However, the interferometric measurement process, usually used for the surface form topography characterization, suffers from multiple interference patterns. This increases the total measurement error. In this paper the frequency-tuned interferometric method, that overcomes this problem, is demonstrated and compared to commonly used techniques using immersion liquid. Using a tunable laser source together with a frequency separation of the phase information from both surfaces, fringes from the first and second surface can be distinguished. Also, the interference between both surfaces can be used to obtain the wedge and thickness values of the specimen.

Druh

D - Stať ve sborníku

CEP obor

—

OECD FORD obor

10306 - Optics (including laser optics and quantum optics)

Projekt

—

Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2020

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Proceedings of SPIE - The International Society for Optical Engineering, Interferometry XX

ISBN

9781510637863

ISSN

0277-786X

e-ISSN

—

Počet stran výsledku

7

Strana od-do

—

Název nakladatele

SPIE

Místo vydání

—

Místo konání akce

Online Only, United States

Datum konání akce

1. 1. 2020

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

000589987200023