Plasma enhanced chemical vapor deposition of iron doped thin dioxide films, their structure and photowetting effect

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F46747885%3A24620%2F15%3A00001918" target="_blank" >RIV/46747885:24620/15:00001918 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1016/j.tsf.2015.06.025" target="_blank" >http://dx.doi.org/10.1016/j.tsf.2015.06.025</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.tsf.2015.06.025" target="_blank" >10.1016/j.tsf.2015.06.025</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Plasma enhanced chemical vapor deposition of iron doped thin dioxide films, their structure and photowetting effect

Popis výsledku v původním jazyce

Iron doped titanium dioxide coatings were synthesized with the help of RF plasma enhanced CVD technique. As a source of titanium, titanium chloride (IV) TiCl4 was used while iron pentacarbonyl (0) Fe(CO)5 served as iron supply. The coatings were diagnosed using Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM). Their elemental and chemical composition was studied with the help of X-ray energy dispersive spectroscopy (EDS) and Fourier transform infrared (FTIR) spectroscopy, respectively. For the determination of their optical properties, variable angle spectroscopic ellipsometry (VASE) and ultraviolet-visible (UV-Vis) spectroscopy techniques were used. Iron content in the range of 0.07?11.5 at% was found in the films. Apart from oxygen, titanium and iron, a presence of trace amounts of chlorine, very likely originating from the titanium precursor, was recorded. FTIR studies showed that iron was built-in in the structure of TiO2 matrix. Surface roughness, assessed usin

Název v anglickém jazyce

Plasma enhanced chemical vapor deposition of iron doped thin dioxide films, their structure and photowetting effect

Popis výsledku anglicky

Iron doped titanium dioxide coatings were synthesized with the help of RF plasma enhanced CVD technique. As a source of titanium, titanium chloride (IV) TiCl4 was used while iron pentacarbonyl (0) Fe(CO)5 served as iron supply. The coatings were diagnosed using Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM). Their elemental and chemical composition was studied with the help of X-ray energy dispersive spectroscopy (EDS) and Fourier transform infrared (FTIR) spectroscopy, respectively. For the determination of their optical properties, variable angle spectroscopic ellipsometry (VASE) and ultraviolet-visible (UV-Vis) spectroscopy techniques were used. Iron content in the range of 0.07?11.5 at% was found in the films. Apart from oxygen, titanium and iron, a presence of trace amounts of chlorine, very likely originating from the titanium precursor, was recorded. FTIR studies showed that iron was built-in in the structure of TiO2 matrix. Surface roughness, assessed usin

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

<a href="/cs/project/LO1201" target="_blank" >LO1201: ROZVOJ ÚSTAVU PRO NANOMATERIÁLY, POKROČILÉ TECHNOLOGIE A INOVACE TECHNICKÉ UNIVERZITY V LIBERCI</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2015

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Thin Solid Films

ISSN

0040-6090

e-ISSN

—

Svazek periodika

589

Číslo periodika v rámci svazku

31 August 2015

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

8

Strana od-do

605-612

Kód UT WoS článku

000360320000096

EID výsledku v databázi Scopus

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