Reactive Magnetron Sputtering of AlN Hard Films and Tribological Properties

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F46747885%3A24620%2F16%3A00000439" target="_blank" >RIV/46747885:24620/16:00000439 - isvavai.cz</a>

Výsledek na webu

<a href="http://techsys.tu-plovdiv.bg/en/" target="_blank" >http://techsys.tu-plovdiv.bg/en/</a>

DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Reactive Magnetron Sputtering of AlN Hard Films and Tribological Properties

Popis výsledku v původním jazyce

Aluminum nitride (AlN) films were grown on steel and Si (100) substrates by DC magnetron sputtering in plasma containing a mixture of argon and nitrogen, using a pure aluminum target. From the measurement of nanomechanical properties of AlN thin films, the higher hardness of 28 GPa and elastic modulus of 437 GPa are obtained. The surface topography of 2 µm thick AlN was investigated by atomic force microscopy (AFM) in contact mode and an average surface roughness of 640nm was obtained.Wear testing was done using a CETR UMI Multi-Specimen Test System in ball-on-disc mode at the room temperature. Evaluation of the friction coefficient and the wear rate of coatings and balls were determined. ISO 683/XIII-74 bearing steel with a diameter of 6.35 mm was used as counter-part. The calculated wear rate of the AlN coating is 1.22x10-3 mm3N-1m-1and the coefficient of friction is 0.3.

Název v anglickém jazyce

Reactive Magnetron Sputtering of AlN Hard Films and Tribological Properties

Popis výsledku anglicky

Aluminum nitride (AlN) films were grown on steel and Si (100) substrates by DC magnetron sputtering in plasma containing a mixture of argon and nitrogen, using a pure aluminum target. From the measurement of nanomechanical properties of AlN thin films, the higher hardness of 28 GPa and elastic modulus of 437 GPa are obtained. The surface topography of 2 µm thick AlN was investigated by atomic force microscopy (AFM) in contact mode and an average surface roughness of 640nm was obtained.Wear testing was done using a CETR UMI Multi-Specimen Test System in ball-on-disc mode at the room temperature. Evaluation of the friction coefficient and the wear rate of coatings and balls were determined. ISO 683/XIII-74 bearing steel with a diameter of 6.35 mm was used as counter-part. The calculated wear rate of the AlN coating is 1.22x10-3 mm3N-1m-1and the coefficient of friction is 0.3.

Druh

D - Stať ve sborníku

CEP obor

JK - Koroze a povrchové úpravy materiálu

OECD FORD obor

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Projekt

<a href="/cs/project/LO1201" target="_blank" >LO1201: ROZVOJ ÚSTAVU PRO NANOMATERIÁLY, POKROČILÉ TECHNOLOGIE A INOVACE TECHNICKÉ UNIVERZITY V LIBERCI</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2016

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

FUNDAMENTAL SCIENCES AND APPLICATIONS

ISBN

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ISSN

1310-8271

e-ISSN

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Počet stran výsledku

4

Strana od-do

252-255

Název nakladatele

Technical University - Sofia, Plovdiv branch, Bulgaria

Místo vydání

Plovdiv

Místo konání akce

Plovdiv, Bulgaria

Datum konání akce

1. 1. 2016

Typ akce podle státní příslušnosti

EUR - Evropská akce

Kód UT WoS článku

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