Transfer of the sputter technique for deposition of strongly thermochromic VO2-based coatings on ultrathin flexible glass to large-scale roll-to-roll device

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F22%3A43965264" target="_blank" >RIV/49777513:23520/22:43965264 - isvavai.cz</a>

Výsledek na webu

<a href="https://doi.org/10.1016/j.surfcoat.2022.128273" target="_blank" >https://doi.org/10.1016/j.surfcoat.2022.128273</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2022.128273" target="_blank" >10.1016/j.surfcoat.2022.128273</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Transfer of the sputter technique for deposition of strongly thermochromic VO2-based coatings on ultrathin flexible glass to large-scale roll-to-roll device

Popis výsledku v původním jazyce

The reversible semiconductor-to-metal transition of vanadium dioxide (VO2) makes VO2-based coatings a promising candidate for thermochromic smart windows, reducing the energy consumption of buildings. We report on transfer of the sputter technique for deposition of strongly thermochromic ZrO2/W-doped VO2/ZrO2 coatings on ultrathin (0.1 mm) flexible glass from a laboratory-scale device with three (V, W and Zr) planar magnetron targets to a large-scale roll-to-roll device with two (W-doped V and ZrO2) rotatable magnetron targets. The depositions were performed at a relatively low substrate surface temperature (330–350 °C) and without any substrate bias voltage. The W-doped VO2 layers were deposited using a reactive high-power impulse magnetron sputtering with a pulsed O2 flow control. We compare the process parameters used in both deposition devices and explain the basic principle of this sputter technique using the discharge characteristics measured during a large-scale roll-to-roll deposition. We characterize the design, structure (X-ray diffraction) and optical properties (spectrophotometry and spectroscopic ellipsometry) of the three-layer coatings. The coatings prepared on ultrathin flexible glass using the large-scale roll-to-roll device at a temperature close to 350 °C exhibit a low transition temperature of 22 °C, an integral luminous transmittance over 45% and a modulation of the solar energy transmittance approaching 10%. This is a promising first step to a cost-effective and high-rate preparation of large-area thermochromic VO2-based coatings for future smart-window applications.

Název v anglickém jazyce

Transfer of the sputter technique for deposition of strongly thermochromic VO2-based coatings on ultrathin flexible glass to large-scale roll-to-roll device

Popis výsledku anglicky

The reversible semiconductor-to-metal transition of vanadium dioxide (VO2) makes VO2-based coatings a promising candidate for thermochromic smart windows, reducing the energy consumption of buildings. We report on transfer of the sputter technique for deposition of strongly thermochromic ZrO2/W-doped VO2/ZrO2 coatings on ultrathin (0.1 mm) flexible glass from a laboratory-scale device with three (V, W and Zr) planar magnetron targets to a large-scale roll-to-roll device with two (W-doped V and ZrO2) rotatable magnetron targets. The depositions were performed at a relatively low substrate surface temperature (330–350 °C) and without any substrate bias voltage. The W-doped VO2 layers were deposited using a reactive high-power impulse magnetron sputtering with a pulsed O2 flow control. We compare the process parameters used in both deposition devices and explain the basic principle of this sputter technique using the discharge characteristics measured during a large-scale roll-to-roll deposition. We characterize the design, structure (X-ray diffraction) and optical properties (spectrophotometry and spectroscopic ellipsometry) of the three-layer coatings. The coatings prepared on ultrathin flexible glass using the large-scale roll-to-roll device at a temperature close to 350 °C exhibit a low transition temperature of 22 °C, an integral luminous transmittance over 45% and a modulation of the solar energy transmittance approaching 10%. This is a promising first step to a cost-effective and high-rate preparation of large-area thermochromic VO2-based coatings for future smart-window applications.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20506 - Coating and films

Projekt

—

Návaznosti

R - Projekt Ramcoveho programu EK

Rok uplatnění

2022

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

1879-3347

Svazek periodika

442

Číslo periodika v rámci svazku

SI

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

8

Strana od-do

"128273-1"-"128273-8"

Kód UT WoS článku

000822952500002

EID výsledku v databázi Scopus

2-s2.0-85125709758