Tailoring properties of indium tin oxide thin films for their work in both electrochemical and optical label-free sensing systems

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60076658%3A12310%2F21%3A43902987" target="_blank" >RIV/60076658:12310/21:43902987 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68378271:_____/21:00552199

Výsledek na webu

<a href="https://www.sciencedirect.com/science/article/pii/S0925400521007425?via%3Dihub" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0925400521007425?via%3Dihub</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.snb.2021.130173" target="_blank" >10.1016/j.snb.2021.130173</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Tailoring properties of indium tin oxide thin films for their work in both electrochemical and optical label-free sensing systems

Popis výsledku v původním jazyce

This work is devoted to the identification properties of indium tin oxide (ITO) thin films responsible for their possible application in combined optical and electrochemical label-free sensing systems offering enhanced functionalities. Since any post-processing would make it difficult to identify direct relation between deposition parameters and properties of the ITO films, especially when deposition on temperature-sensitive substrates is considered, the films were deposited using reactive high power impulse magnetron sputtering (HiPIMS) at low temperature and with no post-deposition annealing. We focused mainly on the impact of reactive gases, such as oxygen or nitrogen introduced to the process chamber, on control over plasma parameters and subsequently properties of the films. The properties of the films were investigated using X-ray diffractometry, spectroscopic ellipsometry, four-point probe, and cyclic voltammetry. For presenting optical sensing capabilities, the tailored ITO films in addition to silicon and glass wafers were also deposited on the core of optical fibers to induce the lossy-mode resonance (LMR) phenomenon. The existence of specific deposition conditions resulting in ITO film properties offering both high-quality electrochemical and LMR responses has been experimentally proven. It has been found that the crystalline structure of ITO plays a key role in the determination of both the sensing capabilities. Finally, label-free sensing of antibody-antibody interactions in both optical and electrochemical domains for the sensor with tailored ITO film has been shown.

Název v anglickém jazyce

Tailoring properties of indium tin oxide thin films for their work in both electrochemical and optical label-free sensing systems

Popis výsledku anglicky

This work is devoted to the identification properties of indium tin oxide (ITO) thin films responsible for their possible application in combined optical and electrochemical label-free sensing systems offering enhanced functionalities. Since any post-processing would make it difficult to identify direct relation between deposition parameters and properties of the ITO films, especially when deposition on temperature-sensitive substrates is considered, the films were deposited using reactive high power impulse magnetron sputtering (HiPIMS) at low temperature and with no post-deposition annealing. We focused mainly on the impact of reactive gases, such as oxygen or nitrogen introduced to the process chamber, on control over plasma parameters and subsequently properties of the films. The properties of the films were investigated using X-ray diffractometry, spectroscopic ellipsometry, four-point probe, and cyclic voltammetry. For presenting optical sensing capabilities, the tailored ITO films in addition to silicon and glass wafers were also deposited on the core of optical fibers to induce the lossy-mode resonance (LMR) phenomenon. The existence of specific deposition conditions resulting in ITO film properties offering both high-quality electrochemical and LMR responses has been experimentally proven. It has been found that the crystalline structure of ITO plays a key role in the determination of both the sensing capabilities. Finally, label-free sensing of antibody-antibody interactions in both optical and electrochemical domains for the sensor with tailored ITO film has been shown.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10406 - Analytical chemistry

Projekt

<a href="/cs/project/GA19-20168S" target="_blank" >GA19-20168S: Nanostruktury pro LSPR senzory na optickém vlákně</a><br>

Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2021

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Sensors and Actuators B: Chemical

ISSN

0925-4005

e-ISSN

—

Svazek periodika

343

Číslo periodika v rámci svazku

SEP 15 2021

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

11

Strana od-do

—

Kód UT WoS článku

000663571400001

EID výsledku v databázi Scopus

2-s2.0-85106666042