Characterization of off-axis single target RF magnetron co-sputtered iron doped tin

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389005%3A_____%2F10%3A00353788" target="_blank" >RIV/61389005:_____/10:00353788 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Characterization of off-axis single target RF magnetron co-sputtered iron doped tin

Popis výsledku v původním jazyce

The iron doped SnO2 coatings for sensor applications were studied by AFM, XPS, RBS and XRD techniques. The coatings were deposited by a magnetron sputtering from a single SnO2 target with an iron inset. Two different off-axis deposition arrangements wereinvestigated. The iron concentration in the coating was controlled in the range from 0 up to 5 at.% by two basic external parameters, the fraction of the iron stripe directly in the erosion zone and the RF power. The deposition process was reproducibleand deposited substoichiometric Fe:SnO2 films were homogenous, flat, amorphous and thermally stable up to post deposition annealing at 600 °C. The elevated deposition temperatures up to 400 °C and post annealing up to 600 °C for 10 min or 400 °C for 25 hhad no significant influence on the composition, the topology and the structure of coatings. The iron dopant in the film has probably ?-Fe2O3 bonding structure.

Název v anglickém jazyce

Characterization of off-axis single target RF magnetron co-sputtered iron doped tin

Popis výsledku anglicky

The iron doped SnO2 coatings for sensor applications were studied by AFM, XPS, RBS and XRD techniques. The coatings were deposited by a magnetron sputtering from a single SnO2 target with an iron inset. Two different off-axis deposition arrangements wereinvestigated. The iron concentration in the coating was controlled in the range from 0 up to 5 at.% by two basic external parameters, the fraction of the iron stripe directly in the erosion zone and the RF power. The deposition process was reproducibleand deposited substoichiometric Fe:SnO2 films were homogenous, flat, amorphous and thermally stable up to post deposition annealing at 600 °C. The elevated deposition temperatures up to 400 °C and post annealing up to 600 °C for 10 min or 400 °C for 25 hhad no significant influence on the composition, the topology and the structure of coatings. The iron dopant in the film has probably ?-Fe2O3 bonding structure.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

<a href="/cs/project/LC06041" target="_blank" >LC06041: Příprava, modifikace a charakterizace materiálů energetickým zářením</a><br>

Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2010

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

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Svazek periodika

205

Číslo periodika v rámci svazku

-

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

5

Strana od-do

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Kód UT WoS článku

000286343200025

EID výsledku v databázi Scopus

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