Computer simulation of RBS spectra from samples with surface roughness

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389005%3A_____%2F16%3A00459132" target="_blank" >RIV/61389005:_____/16:00459132 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/44555601:13440/16:43887649

Výsledek na webu

<a href="http://dx.doi.org/10.1016/j.nimb.2015.10.001" target="_blank" >http://dx.doi.org/10.1016/j.nimb.2015.10.001</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.nimb.2015.10.001" target="_blank" >10.1016/j.nimb.2015.10.001</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Computer simulation of RBS spectra from samples with surface roughness

Popis výsledku v původním jazyce

A fast code for the simulation of common RBS spectra including surface roughness effects has been written and tested on virtual samples comprising either a rough layer deposited on a smooth substrate or smooth layer deposited on a rough substrate and simulated at different geometries. The sample surface or interface relief has been described by a polyline and the simulated RBS spectrum has been obtained as the sum of many particular spectra from randomly chosen particle trajectories. The code includes several procedures generating virtual samples with random and regular (periodical) roughness. The shape of the RBS spectra has been found to change strongly with increasing sample roughness and an increasing angle of the incoming ion beam.

Název v anglickém jazyce

Computer simulation of RBS spectra from samples with surface roughness

Popis výsledku anglicky

A fast code for the simulation of common RBS spectra including surface roughness effects has been written and tested on virtual samples comprising either a rough layer deposited on a smooth substrate or smooth layer deposited on a rough substrate and simulated at different geometries. The sample surface or interface relief has been described by a polyline and the simulated RBS spectrum has been obtained as the sum of many particular spectra from randomly chosen particle trajectories. The code includes several procedures generating virtual samples with random and regular (periodical) roughness. The shape of the RBS spectra has been found to change strongly with increasing sample roughness and an increasing angle of the incoming ion beam.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BG - Jaderná, atomová a molekulová fyzika, urychlovače

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2016

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Nuclear Instruments & Methods in Physics Research Section B

ISSN

0168-583X

e-ISSN

—

Svazek periodika

371

Číslo periodika v rámci svazku

MAR

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

5

Strana od-do

101-105

Kód UT WoS článku

000373412000019

EID výsledku v databázi Scopus

2-s2.0-84960242202