Au incorporation into various ZnO crystallographic cuts realised by ion implantation - ZnO damage characterization

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389005%3A_____%2F19%3A00511855" target="_blank" >RIV/61389005:_____/19:00511855 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/60461373:22310/19:43919985 RIV/44555601:13440/19:43894755

Výsledek na webu

<a href="https://doi.org/10.1016/j.vacuum.2019.108892" target="_blank" >https://doi.org/10.1016/j.vacuum.2019.108892</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.vacuum.2019.108892" target="_blank" >10.1016/j.vacuum.2019.108892</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Au incorporation into various ZnO crystallographic cuts realised by ion implantation - ZnO damage characterization

Popis výsledku v původním jazyce

This paper presents a study of defect evolution in various ZnO crystallographic cuts caused by Au implantation. The investigation has focused on ZnO structure characterisation, Au distribution and the interior morphology of the a-, m- and c-planes ZnO single crystals implanted with 400 keV Au+ ions at the ion fluences of 5 x 10(14) and 1 x 10(15) cm(-2) and subsequently annealed at 600 degrees C in O-2. The structure modification was studied using Rutherford backscattering spectrometry in the channelling mode and Raman spectroscopy. After the ion-implantation process, low surface damage was observed in all ZnO orientations unlike deep structural damage. Deep structural damage grew with increased Au-ion fluence and Au did not exhibit strong out-diffusion from the depth to the surface during the post-implantation annealing. Small but noticeable differences were observed between different ZnO orientations. RBS measurements during ion implantation revealed more progressive deep-damage formation in the c- and m-planes than in the a-plane ZnO. Simultaneously, the smallest Zn sub-lattice disorder deduced from RBS/C measurements was observed in the a-plane ZnO. During post-implantation annealing, a slight structure recovery (about 4%) was observed in all orientations. Raman spectroscopy confirmed the increasing structure disorder with the enhanced ion fluence for all as-implanted ZnO orientations and a partial reconstruction of the ZnO structure during annealing, when the intensity of E-2 phonons was increased and that of longitudinal optical (LO) phonons was suppressed because of the disorder recovery. E-2 (high) and E-1 (LO) Raman phonon modes connected with oxygen sub-lattice ordering/disordering have been investigated in detail - they show a significant modification mainly in the m-plane. The cause of the different behaviour of ZnO planes as well as the differences in the incorporation and movement of Au and Er atoms in the ZnO structure are discussed in the work.

Název v anglickém jazyce

Au incorporation into various ZnO crystallographic cuts realised by ion implantation - ZnO damage characterization

Popis výsledku anglicky

This paper presents a study of defect evolution in various ZnO crystallographic cuts caused by Au implantation. The investigation has focused on ZnO structure characterisation, Au distribution and the interior morphology of the a-, m- and c-planes ZnO single crystals implanted with 400 keV Au+ ions at the ion fluences of 5 x 10(14) and 1 x 10(15) cm(-2) and subsequently annealed at 600 degrees C in O-2. The structure modification was studied using Rutherford backscattering spectrometry in the channelling mode and Raman spectroscopy. After the ion-implantation process, low surface damage was observed in all ZnO orientations unlike deep structural damage. Deep structural damage grew with increased Au-ion fluence and Au did not exhibit strong out-diffusion from the depth to the surface during the post-implantation annealing. Small but noticeable differences were observed between different ZnO orientations. RBS measurements during ion implantation revealed more progressive deep-damage formation in the c- and m-planes than in the a-plane ZnO. Simultaneously, the smallest Zn sub-lattice disorder deduced from RBS/C measurements was observed in the a-plane ZnO. During post-implantation annealing, a slight structure recovery (about 4%) was observed in all orientations. Raman spectroscopy confirmed the increasing structure disorder with the enhanced ion fluence for all as-implanted ZnO orientations and a partial reconstruction of the ZnO structure during annealing, when the intensity of E-2 phonons was increased and that of longitudinal optical (LO) phonons was suppressed because of the disorder recovery. E-2 (high) and E-1 (LO) Raman phonon modes connected with oxygen sub-lattice ordering/disordering have been investigated in detail - they show a significant modification mainly in the m-plane. The cause of the different behaviour of ZnO planes as well as the differences in the incorporation and movement of Au and Er atoms in the ZnO structure are discussed in the work.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10301 - Atomic, molecular and chemical physics (physics of atoms and molecules including collision, interaction with radiation, magnetic resonances, Mössbauer effect)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2019

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Vacuum

ISSN

0042-207X

e-ISSN

—

Svazek periodika

169

Číslo periodika v rámci svazku

11

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

9

Strana od-do

UNSP 108892

Kód UT WoS článku

000494887000044

EID výsledku v databázi Scopus

2-s2.0-85071987675