Aspheric surface measurement by absolute wavelength scanning interferometry with model-based retrace error correction

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F23%3A00581641" target="_blank" >RIV/61389021:_____/23:00581641 - isvavai.cz</a>

Výsledek na webu

<a href="https://opg.optica.org/oe/fulltext.cfm?uri=oe-31-8-12449&id=528666" target="_blank" >https://opg.optica.org/oe/fulltext.cfm?uri=oe-31-8-12449&id=528666</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1364/OE.486133" target="_blank" >10.1364/OE.486133</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Aspheric surface measurement by absolute wavelength scanning interferometry with model-based retrace error correction

Popis výsledku v původním jazyce

This paper presents a non-nulling absolute interferometric method for fast and full-area measurement of aspheric surfaces without the necessity of any mechanical movement. Several single frequency laser diodes with some degree of laser tunability are used to achieve an absolute interferometric measurement. The virtual interconnection of three different wavelengths makes it possible to accurately measure the geometrical path difference between the measured aspheric surface and the reference Fizeau surface independently for each pixel of the camera sensor. It is thus possible to measure even in undersampled areas of the high fringe density interferogram. After measuring the geometrical path difference, the retrace error associated with the non-nulling mode of the interferometer is compensated for using a calibrated numerical model (numerical twin) of the interferometer. A height map representing the normal deviation of the aspheric surface from its nominal shape is obtained. The principle of absolute interferometric measurement and numerical error compensation are described in this paper. The method was experimentally verified by measuring an aspheric surface with a measurement uncertainty of λ/20, and the results were in good agreement with the results of a single-point scanning interferometer.

Název v anglickém jazyce

Aspheric surface measurement by absolute wavelength scanning interferometry with model-based retrace error correction

Popis výsledku anglicky

This paper presents a non-nulling absolute interferometric method for fast and full-area measurement of aspheric surfaces without the necessity of any mechanical movement. Several single frequency laser diodes with some degree of laser tunability are used to achieve an absolute interferometric measurement. The virtual interconnection of three different wavelengths makes it possible to accurately measure the geometrical path difference between the measured aspheric surface and the reference Fizeau surface independently for each pixel of the camera sensor. It is thus possible to measure even in undersampled areas of the high fringe density interferogram. After measuring the geometrical path difference, the retrace error associated with the non-nulling mode of the interferometer is compensated for using a calibrated numerical model (numerical twin) of the interferometer. A height map representing the normal deviation of the aspheric surface from its nominal shape is obtained. The principle of absolute interferometric measurement and numerical error compensation are described in this paper. The method was experimentally verified by measuring an aspheric surface with a measurement uncertainty of λ/20, and the results were in good agreement with the results of a single-point scanning interferometer.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10306 - Optics (including laser optics and quantum optics)

Projekt

<a href="/cs/project/EF16_026%2F0008390" target="_blank" >EF16_026/0008390: Partnerství pro excelenci v superpřesné optice</a><br>

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2023

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Optics Express

ISSN

1094-4087

e-ISSN

—

Svazek periodika

31

Číslo periodika v rámci svazku

8

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

14

Strana od-do

12449-12462

Kód UT WoS článku

000975856000002

EID výsledku v databázi Scopus

2-s2.0-85152482171