Laser-induced electron dynamics and surface modification in ruthenium thin films

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F23%3A00582474" target="_blank" >RIV/61389021:_____/23:00582474 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68378271:_____/23:00572145

Výsledek na webu

<a href="https://www.sciencedirect.com/science/article/pii/S0042207X23002427?via%3Dihub" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0042207X23002427?via%3Dihub</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.vacuum.2023.112045" target="_blank" >10.1016/j.vacuum.2023.112045</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Laser-induced electron dynamics and surface modification in ruthenium thin films

Popis výsledku v původním jazyce

We performed the experimental and theoretical study of the heating and damaging of ruthenium thin films induced by femtosecond laser irradiation. We present the results of an optical pump-probe thermoreflectance experiment with rotating sample allowing to significantly reduce heat accumulation in irradiated spot. We show the evolution of surface morphology from growth of a heat-induced oxide layer at low and intermediate laser fluences to cracking and grooving at high fluences. Theoretical analysis of thermoreflectance in our pump-probe experiment allows us to relate behavior of hot electrons in ruthenium to the Fermi smearing mechanism. This conclusion invites more research on Fermi smearing of transition metals. The analysis of heating is performed with the two-temperature modeling and molecular dynamics simulation, results of which demonstrate that the calculated single-shot melting threshold is higher than experimental damage threshold. We suggest that the onset of Ru film damage is caused by the heat-induced stresses that lead to cracking of the Ru film. Such damage accumulates during repetitive exposure to light.

Název v anglickém jazyce

Laser-induced electron dynamics and surface modification in ruthenium thin films

Popis výsledku anglicky

We performed the experimental and theoretical study of the heating and damaging of ruthenium thin films induced by femtosecond laser irradiation. We present the results of an optical pump-probe thermoreflectance experiment with rotating sample allowing to significantly reduce heat accumulation in irradiated spot. We show the evolution of surface morphology from growth of a heat-induced oxide layer at low and intermediate laser fluences to cracking and grooving at high fluences. Theoretical analysis of thermoreflectance in our pump-probe experiment allows us to relate behavior of hot electrons in ruthenium to the Fermi smearing mechanism. This conclusion invites more research on Fermi smearing of transition metals. The analysis of heating is performed with the two-temperature modeling and molecular dynamics simulation, results of which demonstrate that the calculated single-shot melting threshold is higher than experimental damage threshold. We suggest that the onset of Ru film damage is caused by the heat-induced stresses that lead to cracking of the Ru film. Such damage accumulates during repetitive exposure to light.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2023

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Vacuum

ISSN

0042-207X

e-ISSN

1879-2715

Svazek periodika

212

Číslo periodika v rámci svazku

June

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

12

Strana od-do

112045

Kód UT WoS článku

000981025200001

EID výsledku v databázi Scopus

2-s2.0-85151528799